지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제19권 제6호
- 발행연도
- 2018.12
- 수록면
- 423 - 427 (5page)
- DOI
- https://doi.org/10.1007/s42341-018-0065-1
이용수
초록· 키워드
오류제보하기
Amorphous Si?Zn?Sn?O (a-SZTO) thin fi lm transistors were fabricated using RF magnetron sputtering at diff erent oxygenpartial pressures to investigate how oxygen aff ects the electrical properties and negative bias thermal stress in the a-SZTOchannel. The threshold voltage (V th ) and subthreshold slope increased from 5.49 to 10.21 V and from 0.59 to 0.71 V/decade,respectively as the oxygen pressure was increased. Contrarily, fi eld eff ect mobility (μ FE ) decreased from 18.259 to 11.521 cm 2 /Vs. It was observed that the increase in the oxygen partial pressure changed the electrical performance of the devices, includingthe V th , μ FE , and on current (I on ), mainly due to the decrease in oxygen vacancies. The stability of the device was observedto be enhanced after increasing the oxygen pressure, mainly because there were fewer oxygen vacancies acting as traps.
목차
등록된 정보가 없습니다.
참고문헌 (18)
참고문헌 신청
K. H. Ji / 2011 / Appl. Phys. Lett 98:103509
E. Chong / 2011 / Electrochem. Solid-State Lett 14:96
이병현 / 2016 / Investigation of the Contact Resistance Between Amorphous Silicon-Zinc-Tin-Oxide Thin Film Transistors and Different Electrodes Using the Transmission Line Method / Transactions on Electrical and Electronic Materials 17(1):46~49
C. Wu / 2013 / Appl. Phys. Lett 103:082109
J. Y. Choi / 2012 / Appl. Phys. Lett 100:022109
E. Chong / 2011 / Electrochem. Solid-State Lett 14:96
이병현 / 2016 / Investigation of the Contact Resistance Between Amorphous Silicon-Zinc-Tin-Oxide Thin Film Transistors and Different Electrodes Using the Transmission Line Method / Transactions on Electrical and Electronic Materials 17(1):46~49
C. Wu / 2013 / Appl. Phys. Lett 103:082109
J. Y. Choi / 2012 / Appl. Phys. Lett 100:022109
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Amorphous Si–Zn–Sn–O Thin Film Transistor with In–Si–O as Transparent Conducting Electrodes
Transactions on Electrical and Electronic Materials
2019 .01
-
Numerical study of oxygen transport characteristics in lead-bismuth eutectic for gas-phase oxygen control
Nuclear Engineering and Technology
2021 .07
-
Effect of Annealing Time on Electrical Performance of SiZnSnO Thin Film Transistor Fabricated by RF Magnetron Sputtering
Transactions on Electrical and Electronic Materials
2015 .01
-
Effect of Annealing Temperature on Enhancement of Electrical Performance and Stability of Amorphous SiZnSnO Thin Film Transistors
Transactions on Electrical and Electronic Materials
2018 .02
-
Effect of Annealing Temperature on the Electrical Performance of SiZnSnO Thin Film Transistors Fabricated by Radio Frequency Magnetron Sputtering
Transactions on Electrical and Electronic Materials
2017 .02
-
Comprehensive Review on Amorphous Oxide Semiconductor Thin Film Transistor
Transactions on Electrical and Electronic Materials
2020 .01
-
Effect of Gas Diffusion Layer on La0.8Sr0.2CoO₃ Bifunctional Electrode for Oxygen Reduction and Evolution Reactions in an Alkaline Solution
한국수소및신에너지학회논문집
2016 .12
-
GZO 박막에 대한 비정질 구조에 따른 산소공공과 전하농도의 연관성에 대한 연구
반도체디스플레이기술학회지
2015 .01
-
Dependency of Si Content on the Performance of Amorphous SiZnSnO Thin Film Transistor Based Logic Circuits for Next-Generation Integrated Circuits
Transactions on Electrical and Electronic Materials
2019 .06
-
Effect of oxygen working pressure on morphology and luminescence properties of SnO2 micro/nanocrystals formed by thermal evaporation method
Journal of Ceramic Processing Research
2018 .10
-
Dependency of Si Content on the Performance of Amorphous SiZnSnO Thin Film Transistor Based Logic Circuits for Next-Generation Integrated Circuits
Transactions on Electrical and Electronic Materials
2019 .01
-
Influence of Si?In?Zn?O/Ag/Si?In?Zn?O Electrode on Amorphous Si?Zn?Sn?O Thin Film Transistors
Transactions on Electrical and Electronic Materials
2021 .01
-
Effect of Double Junctions in Nano Structure Oxide Materials and Gas Sensitivity
Transactions on Electrical and Electronic Materials
2018 .10
-
Experimental Investigation of Ion Mobility Measurements in Oxygen under Different Gas Pressures
Journal of Electrical Engineering & Technology
2017 .03
-
Effects of Oxygen Injection Rates on a-IGZO Thin-film Transistors with Oxygen Plasma Treatment
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2021 .06
-
동물실험용 고압산소챔버 임베디드 시스템 개발
대한전자공학회 학술대회
2021 .06
-
Enhanced Electrical Performance of SiZnSnO Thin Film Transistor with Thin Metal Layer
Transactions on Electrical and Electronic Materials
2017 .06
-
매체순환연소공정용 CaSnO<sub>3</sub> 산소전달입자의 산화·환원 특성 연구
공업화학
2019 .01
-
Effect of Annealing Temperature on Electrical Properties and Stability of Si?Zn?Sn?O Thin Film Transistors Under Temperature Stress
Transactions on Electrical and Electronic Materials
2018 .02
-
Effect of RF Sputtering Power on the Electrical Properties of Si–In–Zn–O Thin Film Transistors
Transactions on Electrical and Electronic Materials
2019 .01
이 논문의 저자 정보
최근 본 자료
댓글(0)
0