Dry Etcher에서 ESC의 중요성

김남헌

한국진공학회 학술발표회초록집

2017 .08

ICP dry etcher에서 세라믹 리드의 온도 조절에 의한 폴리머 증착 양상 수치 모델링

김한빛 ,  주정훈

한국진공학회 학술발표회초록집

2017 .08

Newly Designed Ion Beam Etcher with High Etch Rate

Hee-Woon Cheong

Journal of Magnetics

2015 .12

반도체 식각 공정에서 분압 측정 및 활용

주정훈

한국진공학회 학술발표회초록집

2020 .08

Correlation between Coil Configurations and Discharge Characteristics of a Magnetized Inductively Coupled Plasma

Hee-Woon Cheong

Journal of Magnetics

2016 .06

300 mm wafer 용 ICP dry etcher의 foreline clamp 파손에 따른 터보 분자 펌프의 파괴 양상 분석

정진용 ,  임진형 ,  이인택 외 2명

한국진공학회 학술발표회초록집

2015 .02

Magnetic Flux Density Distributions and Discharge Characteristics of a Newly Designed Magnetized Inductively Coupled Plasma

Hee-Woon Cheong

Journal of Magnetics

2015 .12

Numerical Simulation : Effects of Gas Flow and Heat Transfer on Polymer Deposition in a Plasma Dry Etcher

Junghoon Joo

Applied Science and Convergence Technology

2017 .11

Machine Learning-Based Prediction of Atomic Layer Control for MoS² via Reactive Ion Etcher

Changmin Kim ,  Seunghwan Lee ,  Muyoung Kim 외 3명

Applied Science and Convergence Technology

2023 .09

Numerical Simulation : Effects of Gas Flow and Rf Current Direction on Plasma Uniformity in an ICP Dry Etcher

Junghoon Joo

Applied Science and Convergence Technology

2017 .11

Applications of fluid based plasma simulation : dry etch

주정훈

한국진공학회 학술발표회초록집

2018 .02

Simultaneous quantification of 60 elements associated with dried red peppers by ICP-OES and ICP-MS for routine analysis

Suel Hye Hu ,  Jae-Min An ,  Ji-Hye Lee 외 5명

한국분석과학회 학술대회

2022 .05

Numerical or analog modeling study

이창열

지질학회지

2018 .12

Numerical modeling for large area plasma source for materials processing

Junghoon JOO

한국진공학회 학술발표회초록집

2016 .08

건조방법에 따른 한련초 잎의 영양성분 및 항산화활성 비교

이주민

한국지역사회생활과학회지

2018 .02

Rare Earth Elements analysis in monazite using Na₂O₂ sintering and by ICP-MS and ICP-OES

최원명 ,  박일용 ,  음철헌

한국분석과학회 학술대회

2015 .11

High-Temperature Drying of Bamboo Tubes Pretreated with Polyethylen Glycol Solution

Kang ,  Chun-Won ,  Chung 외 5명

목재공학(Journal of the Korean Wood Science and Technology)

2017 .01

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

ICP-MS를 이용한 사료 내 중금속 분석방법 개발

박민재 ,  김주양 ,  정재학 외 3명

한국분석과학회 학술대회

2023 .05

A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers

Jinyong Jeong ,  Intaek Lee ,  Junghoon Joo

Applied Science and Convergence Technology

2015 .03