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논문 기본 정보

자료유형
학술저널
저자정보
김세현 (부산대학교) 박근형 (부산대학교) 이은빈 (부산대학교) 유근택 (부산대학교) 이동현 (부산대학교) 양건 (부산대학교) 박주용 (부산대학교) 박민혁 (부산대학교)
저널정보
한국표면공학회 한국표면공학회지 한국표면공학회지 제53권 제6호
발행연도
2020.12
수록면
330 - 342 (13page)

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초록· 키워드

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Since the original report on ferroelectricity in Si-doped HfO₂ in 2011, fluorite-structured ferroelectrics have attracted increasing interest due to their scalability, established deposition techniques including atomic layer deposition, and compatibility with the complementary-metal-oxide-semiconductor technology. Especially, the emerging fluorite-structured ferroelectrics are considered promising for the next-generation semiconductor devices such as storage class memories, memory-logic hybrid devices, and neuromorphic computing devices. For achieving the practical semiconductor devices, understanding polarization switching kinetics in fluorite-structured ferroelectrics is an urgent task. To understand the polarization switching kinetics and domain dynamics in this emerging ferroelectric materials, various classical models such as Kolmogorov-Avrami-Ishibashi model, nucleation limited switching model, inhomogeneous field mechanism model, and Du-Chen model have been applied to the fluorite-structured ferroelectrics. However, the polarization switching kinetics of fluorite-structured ferroelectrics are reported to be strongly affected by various nonideal factors such as nanoscale polymorphism, strong effect of defects such as oxygen vacancies and residual impurities, and polycrystallinity with a weak texture. Moreover, some important parameters for polarization switching kinetics and domain dynamics including activation field, domain wall velocity, and switching time distribution have been reported quantitatively different from conventional ferroelectrics such as perovskite-structured ferroelectrics. In this focused review, therefore, the polarization switching kinetics of fluorite-structured ferroelectrics are comprehensively reviewed based on the available literature.

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Abstract
1. 서론
2. 도메인 역학과 분극 반전 동역학
3. 결론
References

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