지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제8권 제4호
- 발행연도
- 2007.1
- 수록면
- 161 - 165 (5page)
이용수
초록· 키워드
오류제보하기
In this work, Ni thin films with different thickness from 1,523 Å to 9,827 Å were deposited for the application of micro thermal flow sensors by a magnetron sputtering and oxidized through annealing at 450 ℃ with increasing annealing time. The initial variation of resistivity decreased radically with increasing films thickness, then gradually stabilizes as the thickness increases. The resistivity of Ni thin films with 3,075 Å increased suddenly with increasing annealing time at 450 ℃, then gradually stabilizes as the thickness increases after the annealing time 9h. In case of 3,075 Å and 9,827 Å films, the average of TCR values, measured for the operating temperature range of 0℃ to 180℃, were 2,413.1 ppm/℃ and 4,438.5 ppm/℃, respectively. Because of their high resistivity and very linear TCR, Ni oxide thin films are superior to pure Ni and Pt thin films for flow and temperature sensor applications.
목차
등록된 정보가 없습니다.
참고문헌 (13)
참고문헌 신청
/ 1974 / Integrated silicon anemometer
/ 1985 / high-performance mass-flow sensor with integrated laminar flow micro-channels
/ 1997 / Electrical properties of nickel-zirconia cermet films for temperature and flow-sensor application 63 (1) : 33 ~
/ 1997 / Microstructure and temperature coefficient of resistance of platinum films 36 : 834 ~
/ 1998 / Characterization of highly Doped n- and p- type 6H-SiC Piezoresistors 45 : 785 ~
/ 1985 / high-performance mass-flow sensor with integrated laminar flow micro-channels
/ 1997 / Electrical properties of nickel-zirconia cermet films for temperature and flow-sensor application 63 (1) : 33 ~
/ 1997 / Microstructure and temperature coefficient of resistance of platinum films 36 : 834 ~
/ 1998 / Characterization of highly Doped n- and p- type 6H-SiC Piezoresistors 45 : 785 ~
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Formation of nickel oxide thin film and analysis of its electrical properties
센서학회지
2005 .01
-
열형센서용 니켈 산화막의 형성 및 특성분석
전기전자재료학회논문지
2005 .01
-
Microstructure and Characterization of Ni-C Films Fabricated by Dual-Source Deposition System
한국재료학회지
2016 .01
-
Thickness Dependence of the Electrical Properties inNiCr Thin Film Resistors Annealed in a Vacuum Ambient for π- type Attenuator Applications
전기전자재료학회논문지
2006 .01
-
DC 마그네트론 스퍼터링 NiCr 박막의 열처리 조건에 따른 미세구조 및 표면특성
전기전자재료학회논문지
2005 .01
-
Rapid-Thermal Pulse 화학증착법에 의해 증착된 그래핀 박막에서 촉매금속 Ni의 두께 및 열처리 조건의 영향
한국재료학회지
2011 .01
-
Fabrication and Characterization of Ni-Cr Alloy Thin Films for Application to Precision Thin Film Resistors
Journal of Electrical Engineering & Technology
2007 .12
-
Ni-Cr계 합금을 이용한 정밀 박막저항체의 제조 및 특성
전기전자재료학회논문지
2006 .01
-
듀얼 소스 증착장치를 이용한 Ni-C 박막의 특성에 관한 연구
열처리공학회지
2008 .01
-
분위기 산소농도 및 열처리에 따른 Mn-Ni계 산화물 박막의 특성
한국재료학회지
1999 .01
-
Influence of Heat Treatment on the Structural, Electrical and Optical Properties of Aluminum-Doped Zinc Oxide Thin Films Prepared by Magnetron Sputtering
Current Photovoltaic Research
2013 .12
-
Investigation on Mechanical Property and Adhesion of Oxide Films Formed on Ni andNi-Co Alloy in Room and High Temperature Environments
Corrosion Science and Technology
2008 .01
-
YSZ/CeO$_2$/Ni 에서 산소 분압의 완층충 특성에 대한 영향
한국초전도학회 High Temperature Superconductivity
1999 .01
-
Surface and Electrical Properties of 2wt% Cr-doped Ni Ultrathin Film Electrode for MLCCs
센서학회지
2015 .01
-
무전해 도금을 이용한 Si 태양전지 Ni-W-P/Cu 전극 형성
한국표면공학회지
2016 .02
-
Pt100 유연온도센서에서 Pt 박막 두께에 따른 TCR 특성
한국생산제조학회 학술발표대회 논문집
2015 .04
-
Effect of Annealing and Co contents on the Structural and Physical Properties in AlN Thin Films
열처리공학회지
2010 .01
-
Electrical Properties and Microstructures in Ti Films Deposited by TFT dc Sputtering
한국재료학회지
2016 .01
이 논문의 저자 정보
최근 본 자료
댓글(0)
0