Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Density Functional Theory Study of Silicon Chlorides for Atomic Layer Deposition of Silicon Nitride Thin Films

Luchana L. Yusup ,  Sung-Joo Woo ,  Jae-Min Pa 외 2명

한국진공학회 학술발표회초록집

2014 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

PECVD로 증착된 Silicon Nitride 박막의 특성연구

이중환 ,  권오준 ,  전무식 외 1명

한국진공학회 학술발표회초록집

1992 .07

High Density Plasma Nitrogen Implantation을 이용한 Silicon Nitride 형성

김태호 ,  김형석 ,  김지영

한국진공학회 학술발표회초록집

2000 .02

Low-temperature PECVD silicon nitride film for the fabrication of capacitance type pressure sensor

Kyeong-Keun CHOI ,  Kee JONG ,  Jeong-Yoon LEE 외 1명

한국진공학회 학술발표회초록집

2016 .08

Silicon nitride cleaning by F₂ / Ar remote plasma processing

J. Y. Hwang ,  S. C. Kang ,  N. E. Lee 외 2명

한국진공학회 학술발표회초록집

2004 .08

Synthesis and Characterization of Tin Nitride Thin Films Deposited by Low Nitrogen Gas Ratio

박주연 ,  강용철

한국진공학회 학술발표회초록집

2014 .02

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

The effect of thermal anneal on luminescence and photovoltaic characteristics of B doped silicon-rich silicon-nitride thin films on n-type Si substrate

Se-Young Seo ,  In Yong Kim ,  Seung Hui Hong 외 1명

한국진공학회 학술발표회초록집

2010 .02

How long can a monolayer thick silicon nitride island sustain oxygen exposure ?

Jeong Sook Ha ,  Kang-Ho Pa ,  k 외 2명

한국진공학회 학술발표회초록집

1997 .07

Mechanical Properties of High Stressed Silicon Nitride Beam Measured by Quasi-static and Dynamic Techniques

Dong Hoon Shin ,  Hakseong Kim ,  Ki 외 8명

한국진공학회 학술발표회초록집

2016 .02

Behaviour of nitrided layer formed on S45C carbon steel during gaseous nitriding

손석원 ,  유광춘 ,  이원범

한국진공학회 학술발표회초록집

2016 .02

Characterization of Fe Ion Implanted Boron Nitride

장홍규 ,  김현경 ,  문대원 외 2명

한국진공학회 학술발표회초록집

1993 .07

Effect of triple stacked bandgap-engineered tunneling barrier with silicon-richsilicon- nitride layer as charge storage node in non-volatile memory applications

Taekyung Yim ,  Eunkyeom Kim ,  Seungman An 외 5명

한국진공학회 학술발표회초록집

2009 .08

Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD

Jae Eun Kim ,  Kyung Dong Lee ,  Yoonmook Kang 외 2명

한국진공학회 학술발표회초록집

2016 .02

Optical and Electrical Characteristics of Si Nano-dots Embedded in Silicon Nitride Thin Film

Kyungsu Lee ,  Eunkyeom Kim ,  Jeongho Kim 외 7명

한국진공학회 학술발표회초록집

2009 .02

Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage

Thuy T. T. Pham ,  J. H. Lee ,  I. K. Kim 외 1명

한국진공학회 학술발표회초록집

2007 .08

Growth of Hexagonal Boron Nitride Thin Films on Silicon Using a Single Source Precursors

Jin-Hyo Boo ,  Soon-Bo Lee ,  Casten Roh 외 1명

한국진공학회 학술발표회초록집

1998 .02