Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage

Thuy T. T. Pham ,  J. H. Lee ,  I. K. Kim 외 1명

한국진공학회 학술발표회초록집

2007 .08

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell

Dongsung LEE

한국진공학회 학술발표회초록집

2016 .08

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Effect of SiF₄ addition on the structures of silicon films deposited at low temperature by remote plasma enhanced chemical vapor deposition

Xiaodong Li ,  Young-Bae Pa ,  k 외 2명

한국진공학회 학술발표회초록집

1995 .06

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition

Bum-Hee Lee ,  Dong-Hee Pa ,  k 외 3명

한국진공학회 학술발표회초록집

2013 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition

Joonwon Lee ,  Jaehyun Han ,  Jong-souk Yeo

한국진공학회 학술발표회초록집

2017 .08

Enhanced Anti-reflective Effect of SiN_x/SiO_x/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

Min-Jun Choi ,  O Dae Kwon ,  Sang Dae Choi 외 3명

Applied Science and Convergence Technology

2016 .07

Synthesis of Graphene by Plasma Enhanced Chemical Vapor Deposition and Its transfer for Device Application

서동익 ,  한정윤 ,  김언정 외 1명

한국진공학회 학술발표회초록집

2010 .08

Plasma Enhanced Chemical Vapor Deposition 을 이용한 TiO₂ 박막의 증착 및 특성 연구

이원규 ,  우성일

한국진공학회 학술발표회초록집

1993 .02