Optical and electrical properties of amorphous silicon quantum dots for device applications

박래만 ,  박성주

한국진공학회 학술발표회초록집

2002 .02

Formation of high-density Si nano dots using sputtered silicon seeds for non-volatile memory applications

임태경 ,  김은겸 ,  이경수 외 5명

한국진공학회 학술발표회초록집

2009 .02

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

The effect of thermal anneal on luminescence and photovoltaic characteristics of B doped silicon-rich silicon-nitride thin films on n-type Si substrate

Se-Young Seo ,  In Yong Kim ,  Seung Hui Hong 외 1명

한국진공학회 학술발표회초록집

2010 .02

Microstructural Characteristics of III-Nitride Layers Grown on Si(110) Substrate by Molecular Beam Epitaxy

Young Heon Kim ,  Sang Jung Ahn ,  Young-Kyun Noh 외 1명

한국진공학회 학술발표회초록집

2014 .02

Nano-floating gate memory using size-controlled Si nanocrystal embedded silicon nitride trap layer

박군호 ,  허철 ,  성건용 외 1명

한국진공학회 학술발표회초록집

2010 .02

Si nano dots growth using pulse-type gas feeding with Si₂H₆ in LPCVD

Chan Pa ,  k ,  Soonjae Jung 외 5명

한국진공학회 학술발표회초록집

2005 .08

Density Functional Theory Study of Silicon Chlorides for Atomic Layer Deposition of Silicon Nitride Thin Films

Luchana L. Yusup ,  Sung-Joo Woo ,  Jae-Min Pa 외 2명

한국진공학회 학술발표회초록집

2014 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Cell Characteristics of a Multiple Alloy Nano-Dots Memory Structure

Gyu Hyun Kil ,  Gae Hun Lee ,  Ho Joong An 외 1명

한국진공학회 학술발표회초록집

2010 .02

Memory Characteristics of High Density Self-assembled FePt Nano-dots Floating Gate with High-k Al₂O₃ Blocking Oxide

Gae Hun Lee ,  Jung Min Lee ,  Hyung Jun Yang 외 2명

한국진공학회 학술발표회초록집

2012 .02

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Electrical Conduction through Atomic / Nano Wires on Silicon

Shuji Hasegawa

한국진공학회 학술발표회초록집

2004 .08

Development of Silicon Quantum Dot Solar Cell

K. J. Kim ,  Y. S. Kim ,  W. Lee 외 5명

한국진공학회 학술발표회초록집

2009 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Characterization of Low Stress Silicon Nitride for Stacked structure application

Kyoung Pil Na ,  So-Yeon Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2009 .08

Key Factors for the Development of Silicon Quantum Dot Solar Cell

김경중 ,  박재희 ,  홍승휘 외 3명

한국진공학회 학술발표회초록집

2012 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08