Density Functional Theory Study of Silicon Chlorides for Atomic Layer Deposition of Silicon Nitride Thin Films

Luchana L. Yusup ,  Sung-Joo Woo ,  Jae-Min Pa 외 2명

한국진공학회 학술발표회초록집

2014 .02

Silicon nitride cleaning by F₂ / Ar remote plasma processing

J. Y. Hwang ,  S. C. Kang ,  N. E. Lee 외 2명

한국진공학회 학술발표회초록집

2004 .08

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

PSII(Plasma Source Ion Implantation)와 PN(Plasma Nitriding)으로 제조한 AlN의 특성 분석

심연근 ,  김윤기 ,  김건우 외 2명

한국진공학회 학술발표회초록집

1999 .07

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Plasma Source Ion Implantation - A Three Dimensional Ion Implantation Technique

Seunghee Han ,  Haidong Kim ,  Yeonhee Lee 외 2명

한국진공학회 학술발표회초록집

1995 .06

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Characterization of Low Stress Silicon Nitride for Stacked structure application

Kyoung Pil Na ,  So-Yeon Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2009 .08

Plasma Source Ion Implantation using High Power Pulsed RF Plasma

Seunghee Han ,  Yeonhee Lee ,  Youngwoo Kim 외 4명

한국진공학회 학술발표회초록집

2004 .02

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Improvement in the bias stability of zinc oxide thin-film transistors using an O₂ plasma-treated silicon nitride insulator

김웅선 ,  문연건 ,  권태석 외 1명

한국진공학회 학술발표회초록집

2010 .02

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage

Thuy T. T. Pham ,  J. H. Lee ,  I. K. Kim 외 1명

한국진공학회 학술발표회초록집

2007 .08

PECVD로 증착된 Silicon Nitride 박막의 특성연구

이중환 ,  권오준 ,  전무식 외 1명

한국진공학회 학술발표회초록집

1992 .07

PLASMA SOURCE ION IMPLANTATION OF NITROGEN AND CARBON IONS INTO CO - CEMENTED WC

SEUNGHEE HAN ,  aYEONHEE LEE ,  JUNGHYE LEE 외 4명

한국진공학회 학술발표회초록집

1999 .07

p-type properties of Ga-ZnO thin films by nitrogen implantation

Juho Kim ,  Young Sung Kim ,  Jae S. Lee 외 2명

한국진공학회 학술발표회초록집

2009 .08

Lifetime Enhancement of Aerospace Components Using a Dual Nitrogen Plasma Immersion Ion Implantation Process

Honghui Tong ,  Qinchuan Chen ,  LiLu Shen 외 6명

Journal of Korean Vacuum Science & Technology

2002 .06