Effect of Multiple Radio-Frequency on Sputter Etching & Ashing in Dual Coil ICP Etcher

Haegyu Jang ,  Min-Shik Kim ,  Kun-Joo Pa 외 2명

한국진공학회 학술발표회초록집

2009 .02

Radio Frequency Inductively Coupled Plasma 를 이용한 High Ionization Sputtering 장치의 제작

주정훈

한국진공학회 학술발표회초록집

1997 .02

Newly Designed Ion Beam Etcher with High Etch Rate

Hee-Woon Cheong

Journal of Magnetics

2015 .12

Correlation between Coil Configurations and Discharge Characteristics of a Magnetized Inductively Coupled Plasma

Hee-Woon Cheong

Journal of Magnetics

2016 .06

Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

HeeHwan Choe

Applied Science and Convergence Technology

2017 .09

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Inductively Coupled Plasma의 Numerical Simulation

주정훈

한국진공학회 학술발표회초록집

1998 .07

Dry etching of SiC in inductively coupled $SF_6/O_2$ Plasma

Yim ,  Jeong-Hyuk ,  Lee 외 13명

한국결정학회 학술연구발표회

2007 .01

ICP dry etcher에서 세라믹 리드의 온도 조절에 의한 폴리머 증착 양상 수치 모델링

김한빛 ,  주정훈

한국진공학회 학술발표회초록집

2017 .08

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

Eun Ho Kim ,  Yu Bin Xiao ,  Hwa Won Lee 외 1명

한국자기학회 학술연구발표회 논문개요집

2010 .12

Surface Coil with an Inductively Coupled Wireless Surface and Volume Coil for Improving the Magnetic Field Sensitivity at 400-MHz MRI

Jeung-Hoon Seo ,  Jae Jun Lee ,  Kyoung-Nam Kim

Journal of Magnetics

2018 .06

Two - dimensional simulation of inductively coupled large - area plasma source

S. E. Pa ,  k ,  J. K. Lee 외 2명

한국진공학회 학술발표회초록집

2002 .02

평판형 직사각 유도결합 플라즈마 표면 처리 시스템의 수치 모델링

주정훈

한국진공학회 학술발표회초록집

2014 .02

Numerical modeling of Si/SiO₂ etching with inductively coupled CF4 plasma

양원균 ,  주정훈

한국진공학회 학술발표회초록집

2010 .08

Dry Etcher에서 ESC의 중요성

김남헌

한국진공학회 학술발표회초록집

2017 .08

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

300 mm wafer용 ICP dry etcher의 수치 모델링

주정훈 ,  김남헌

한국진공학회 학술발표회초록집

2015 .02

Birdcage Coil with Inductively Coupled RF Coil Array for Improving |B₁|-Field Sensitivity In 7-T MRI

Jong-Deok Byun ,  Jeung-Hoon Seo ,  Taewon Kang 외 2명

Journal of Magnetics

2017 .09

Etching characteristics of Ta and TaN using Cl2 / Ar inductively coupled plasma

M. H. Shin ,  S. W. Na ,  N.-E. Lee 외 1명

한국진공학회 학술발표회초록집

2004 .08