지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.27 No.4
- 발행연도
- 2018.7
- 수록면
- 61 - 65 (5page)
이용수
초록· 키워드
오류제보하기
We studied the critical pressure characteristics of an anode type ion beam source driven by both charge repulsion and diffusion mechanism. The critical pressure Pcrit of the diffusion type ion beam source was linearly decreased from 2.5 mTorr to 0.5 mTorr when the gas injection was varied in 3~10 sccm, while the Pcrit of the charge repulsion ion beam source was remained at 3.5 mTorr. At the gas injection of 10 sccm, the range of having normal beam shape in the charge repulsion ion beam source was about 6.4 times wider than that in the diffusion type ion beam source. An impurity of Fe 2p (KE = 776.68 eV) of 12.88 at. % was observed from the glass surface treated with the abnormal beam of the charge repulsion type ion beam source. The body temperature of the diffusion type ion beam source was observed to increase rapidly at the rate of 1.9℃/min for 30 minutes and to vary slowly at the rate of 0.1℃/ min for 200 minutes for an abnormal beam and normal beam, respectively.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experiments
Ⅲ. Results and Discussion
Ⅳ. Conclusions
References
참고문헌 (19)
참고문헌 신청
J.A. Thornton, J. Vac. Sci. Technol., 11, 666 (1974).
K. Guenther, SPIE, 1324, 2 (1990).
B. Movchan and A. Demchishin, Fiz. Met. Metalloved, 28, 653 (1969).
Y.H. Ham, D.A. Shutov, K.H. Baek, L.M. Do, K.S. Kim, C.W. Lee, and K. H. Kwon, Thin Solid Films, 518, 6378 (2010).
S.K. Koh, S.C. Choi, S.Han, J. Cho, W.K. Choi, H.-J. Jung, and H.H. Hur, Key Eng. Materials, 137, 107 (1998).
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Study of Driving and Thermal Stability of Anode-type Ion Beam Source by Charge Repulsion Mechanism
Applied Science and Convergence Technology
2018 .05
-
Study of ion beam shaping of an anode-type ion source coupled with a
Applied Science and Convergence Technology
2018 .07
-
Ion beam figuring with focused anode layer thruster
한국진공학회 학술발표회초록집
2020 .08
-
Atomic layer deposition of high-k dielectrics on graphene through controlled Ar+ Ion beam process
한국진공학회 학술발표회초록집
2016 .08
-
High density micro ion beam by plasma ion source
한국진공학회 학술발표회초록집
2016 .08
-
Fabrication of Potassium Ion Source and its Emission Characteristics
Applied Science and Convergence Technology
2016 .11
-
Modification of electronic properties of graphene by using low-energy K+ ions
한국진공학회 학술발표회초록집
2016 .08
-
Novel Cathode and Anode Materials for Energy Storage Application
한국진공학회 학술발표회초록집
2018 .08
-
Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates
Applied Science and Convergence Technology
2015 .09
-
Development of high-power RF ion source for neutral beam injectors
한국진공학회 학술발표회초록집
2016 .08
-
A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters
Applied Science and Convergence Technology
2021 .05
-
A study on the ion beam etching characteristics in the high aspect ratio contact
한국진공학회 학술발표회초록집
2016 .08
-
Ar+ ion beam treatment for graphene-based electronics
한국진공학회 학술발표회초록집
2016 .08
-
Damages in thin silicon substrate prepared using ion-cut method
한국진공학회 학술발표회초록집
2017 .02
-
Raman microscopy applied to the analysis of carbon-based anode materials for lithium ion battery
한국분석과학회 학술대회
2016 .05
-
The Conceptual Design of Gas Cluster Ion Source for Analytical Equipment
한국진공학회 학술발표회초록집
2015 .02
-
The study of different Si-C ratio by controlling the amount of PVDF as anode material for lithium ion batteries
한국진공학회 학술발표회초록집
2016 .08
-
경쟁 이온 존재하에 Zeolite A 내 Sr2+ 이온의 결정학적 연구
한국암석학회 학술발표회 논문집
2022 .06
-
Forensic analysis of ions in blood sample by ion chromatography
한국분석과학회 학술대회
2016 .11
-
First ion beam commissioning using 28GHz superconducting electron cyclotron resonance ion source for heavy ion accelerator
한국진공학회 학술발표회초록집
2015 .02
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2019-420-001277046