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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.27 No.3
- 발행연도
- 2018.5
- 수록면
- 47 - 51 (5page)
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초록· 키워드
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We fabricated an anode-type ion beam source and studied its driving characteristics of the initial extraction of ions using two driving mechanisms: a diffusion phenomenon and a charge repulsion phenomenon. For specimen exposed to the ion beam in two methods, the surface impurity element was investigated by using X-ray photoelectron spectroscopy. Upon Ar gas injection for plasma generation the ion beam source was operated for 48 hours. We found a Fe 2p peak 5.4 at. % in the initial ions by the diffusion mechanism while no indication of Fe in the ions released in the charge repulsion mechanism. As for a long operation of 200 min, the temperature of ion beam sources was measured to increase at the rate of ~0.1℃/min and kept at the initial value of 27℃ for driving by diffusion and charge repulsion mechanism, respectively. In this study, we confirmed that the ion beam source driven by the charge repulsion mechanism was very efficient for a long operation as proved by little electrode damage and thermal stability.
목차
Abstract
I. Introduction
II. Experiments
III. Results and Discussion
IV. Summary
References
참고문헌 (15)
참고문헌 신청
H.W. Choi, D.H. Park, J.H. Kim, W.K. Choi, Y.J. Sohn, B.S. Song, J. Cho, and Y.S. Kim, J. Kor. Vac. Soc. 16, 79 (2007).
Y.J. Kim, S.M. Hong, and Y.O. Noh, Polymer 37, 431 (2013).
S.J. Kwon, J. Ins. Elec. Eng. Kor. 44, 26 (2007).
E.S. Cho and S.J. Kwon, J. Kor. Vac. Soc. 22, 26 (2013).
V.V. Zhurin, Surface Engineering 27, 311 (2011).
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UCI(KEPA) : I410-ECN-0101-2019-420-001276978