The cryo-vacuum system of east neutral beam injector

Yuanlai XIE ,  Chundong HU ,  Ling TAO 외 6명

한국진공학회 학술발표회초록집

2016 .08

Development of an RF matching system in an RF inductively coupled plasma (ICP) source for 100 kW negative ion beam

박민 ,  정봉기 ,  김태성 외 2명

한국진공학회 학술발표회초록집

2017 .08

Atomic layer deposition of high-k dielectrics on graphene through controlled Ar⁺ Ion beam process

You Jin JI ,  Ki Seok KIM ,  Ki Hyun KIM 외 2명

한국진공학회 학술발표회초록집

2016 .08

High density micro ion beam by plasma ion source

Masaki SUGAWARA ,  Ha ,  uo KASAHARA 외 4명

한국진공학회 학술발표회초록집

2016 .08

Fabrication of Potassium Ion Source and its Emission Characteristics

Dae Sun Choi

Applied Science and Convergence Technology

2016 .11

Analysis of the Characteristics of Radio Frequency Power Transmission Lines Using a Voltage Current Probe in Low-Pressure Discharge

Chan-Won Pa ,  k ,  Hee-Jung Yeom 외 2명

Applied Science and Convergence Technology

2023 .09

Equivalent circuit model of a rectangular RF driven hydrogen ion source for impedance matching network design

허성렬 ,  박민 ,  정봉기 외 4명

한국진공학회 학술발표회초록집

2018 .08

Properties of ZnO:Ga thin films deposited by RF magnetron sputtering under various RF power

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2015 .11

Modification of electronic properties of graphene by using low-energy K⁺ ions

Jingul KIM ,  Paeng ,  o LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Key issues in the design of innovative RF plasma sources

Hong-Young CHANG

한국진공학회 학술발표회초록집

2016 .08

Study of ion beam shaping of an anode-type ion source coupled with a

Whenelt mask ,  Yunsung Huh ,  Yunseok Hwang 외 1명

Applied Science and Convergence Technology

2018 .07

Ion beam figuring with focused anode layer thruster

Oleksii Gi ,  ka ,  Soo Ouk Jang 외 3명

한국진공학회 학술발표회초록집

2020 .08

Investigation of Ne and He Buffer Gases Cooled Ar⁺ Ion Clouds in a Paul Ion Trap

S. M. Sadat Kiai ,  S. Adlpa ,  va 외 4명

Mass Spectrometry Letters

2015 .12

A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters

Ju-Hong Cha ,  Sang-Woo Kim ,  Ho-Jun Lee

Applied Science and Convergence Technology

2021 .05

Ar⁺ ion beam treatment for graphene-based electronics

Kihyun KIM ,  Jinwoo PARK ,  Kiseok KIM 외 2명

한국진공학회 학술발표회초록집

2016 .08

Development o high accuracy VI sensor for RF power systems

김광기 ,  이장재 ,  김시준 외 4명

한국진공학회 학술발표회초록집

2017 .08

Characteristics of Critical Pressure for a Beam Shape of the Anode Type ion Beam Source

Yunsung Huh ,  Yunseok Hwang ,  Jeha Kim

Applied Science and Convergence Technology

2018 .07

A study on the ion beam etching characteristics in the high aspect ratio contact

Ilhyeong LEE ,  Jongkyu KIM ,  Jongsoon PARK 외 6명

한국진공학회 학술발표회초록집

2016 .08

The Conceptual Design of Gas Cluster Ion Source for Analytical Equipment

Mi Sook Won ,  Byoung Seob Lee ,  Myoung Choul Choi 외 5명

한국진공학회 학술발표회초록집

2015 .02

Pin point analysis method using primary ion beam alignment

Junhyoung Lee

한국분석과학회 학술대회

2017 .11