메뉴 건너뛰기
Library Notice
Institutional Access
If you certify, you can access the articles for free.
Check out your institutions.
ex)Hankuk University, Nuri Motors
Log in Register Help KOR
Subject
Humanities
General Humanities History Philosophy Religious Studies Linguistics and Literature Other Humanities
Social science
General Social Science Business Management Tourism Education Military Science Library and Information Science Law Sociology Journalism and Media Studies Psychological Science Political Science and Diplomacy Geography Public Administration Economics International Trade Anthropology Other Social Science
Natural science
General Natural Science Physics Biology Life Sciences Mathematics/Statistics Astronomy Earth Science Chemistry Other Natural Science
Engineering
General Engineering Architectural Engineering Mechanical Engineering Industrial Engineering Material/Energy Engineering Electrical and Electronic Engineering Marine and Ocean Engineering Chemical Engineering Computer Science Other Engineering
Medical science
General Medical Science Nursing Science Veterinary Pharmacy Traditional Korean Medicine Basic Medicine Clinical Medicine Other Medicine
Agriculture and Fishery
General Agriculture and Fishery Agriculture Fishery Science Food Science Forestry Animal Husbandry Marine Transportation Studies Other Agriculture and Fishery
Art and Kinesiology
General Arts Design Fine Arts Cosmetology Photography Music Fashion Kinesiology Performing Media Arts Other Arts and Kinesiology
Interdisciplinary Studies
Interdisciplinary Research Science and Technology Studies Brain and Cognitive Science Technology Policy Other Interdisciplinary Studies

KOR

Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates
Recommendations
Search
Questions

논문 기본 정보

Type
Academic journal
Author
Seunghun Lee (Korea Institute of Materials Science) Do-Geun Kim (Korea Institute of Materials Science)
Journal
The Korean Vacuum Society Applied Science and Convergence Technology Vol.24 No.5 KCI Excellent Accredited Journal SCOPUS
Published
2015.9
Pages
162 - 166 (5page)

Usage

cover
📌
Topic
📖
Background
🔬
Method
🏆
Result
Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates
Ask AI
Recommendations
Search
Questions

Research history (2)

2015

Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates
Seunghun Lee ,  Do-Geun Kim Applied Science and Convergence Technology 2015.09 Academic journal

2012

Roll-to-Roll Barrier Coatings on PET Film by Using a Closed Drift Magnetron Plasma Enhanced Chemical Vapor Deposition
Seunghun Lee ,  Jong-Kuk Kim ,  Do-Geun Kim 한국표면공학회 학술발표회 초록집 2012.05 Proceeding
  • Are you curious about the follow-up research of this article?
  • You can check more advanced research results through related academic papers or academic presentations.
  • Check the research history of this article

Abstract· Keywords

Report Errors
Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1∼3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and 3.5 A/sec, respectively.
#Ion beam #Ion source #Sputtering #Surface treatment #Roll-to-roll

Contents

I. Introduction
II. Experimental Setup
III. Results and Discussion
IV. Concluding Remark
References

References (11)

Add References
[학술지(정기간행물)] - KYUNG WHA OH / 2002 / / Journal of Applied Polymer Science 84 : 1369 ~ 1379 google schola [학술지(정기간행물)] - S. Laux / 1998 / / Thin Solid Films 335 : 1 ~ 5 google schola [학술지(정기간행물)] - Woori Do / 2014 / / Materials Research Bulletin 58 : 164 ~ 168 google schola [학술지(정기간행물)] - Min Zhou / 1999 / / Thin Solid Films 339 : 203 ~ 208 google schola [학술지(정기간행물)] - Y.S. Kim / 2012 / / Appl. Surf. Sci 258 : 3903 ~ 3906 google schola

Recommendations

It is an article recommended by DBpia according to the article similarity. Check out the related articles!

Related Authors

Recently viewed articles

Determinants of Intention to Use toward N Screen Service for Potential User
Kyung-Soo OhThe Korea Contents Society2012.09
 The Solidarity and Possibility of Folklore in Korea
Park, Heung-JuThe Society of Practice Folkloristics2016.08
 Christian Parents’ Perceptions and Practices Regarding Parental Roles
Sung-Won KimKorea Society for Christian Education & Information Technology2015.10

Comments(0)

0

Write first comments.

UCI(KEPA) : I410-ECN-0101-2019-420-001275693