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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.18 No.4
- 발행연도
- 2018.8
- 수록면
- 445 - 453 (9page)
- DOI
- 10.5573/JSTS.2018.18.4.445
이용수
초록· 키워드
오류제보하기
This work reports the simulation of nanoparticle coated MEMS based Alcohol Gas Sensor analysis with various parameters like power consumption, temperature uniformity, resistance change, sensitivity and selectivity. It is achieved by measuring the change in resistance when gas is exposed over the sensing layer. This instantaneous response in detection of gases helps in various application such as breath analyzer in vehicles, breath analyzer, food quality control etc. The gas sensor employs a mesh type poly silicon micro-hotplate structure. The sensor holds a very thin conducting film made of titanium which detects the presence of ethyl alcohol vapors on it. The temperature generated by the hot-plate influences various factors such as the conductance of the film and the quantity of a particular gas adsorbed on it. When sensor film is bring to the right boiling point temperature it evaporates residual vapor particles. For effective sensing of alcohol gas, we optimize the supply voltage (around 3 Volts) and the uniform temperature profile of the micro heater was analyzed (619.29 K) along with sensitivity and selectivity. For the gas sensing analysis, we have compared the sensitivity of thin film coating of ZnO, TiO₂, and SnO. The design was simulated by means of joules heating, thermal expansion and Electric current FEM simulation.
목차
Abstract
I. INTRODUCTION
II. MATHEMATICAL MODELLING OF THIN FILM BASED ALCOHOL SENSOR
III. PHYSICAL ARCHITECTURE OF ALCOHOL SENSOR
IV. CAD MODELLING OF GAS SENSOR
V. GAS SENSING MECHANISM
V. OPTIMIZED SOLUTION AND DISCUSSION
VII. CONCLUSION
REFERENCES
참고문헌 (23)
참고문헌 신청
Sun Anna and Cui Li (1994), “Lipid microresistor as mimicking olfactory sensor: the rule of the response of lipids to C1-C4, alcohols”, IEEE sensors and actuators, Vol. 6, No. 12, pp. 151?158.
Jyh-Jier Ho, Fang Y.K. and Wu K.H.(1998), “High sensitivity ethanol gas sensor integrated with a solid-state heater and thermal isolation improvement structure for legal drink-drive limit detecting”, IEEE sensors and actuators, Vol. 4, No. 8, pp. 227?233.
Faglia G., Comini E. and Pardo M. (1999), “Micromachined gas sensors for environmental pollutants”, Journal of microsystem technologies, Vol. 6, No. 16, pp. 54-59.
Seong-Jeen Kim, Byung-Hyun Jeon, Kyu-Seong Choi (1999), “Improvement of the sensitivity by uv light in alcohol sensors using porous silicon layer”, IEEE sensors and actuators, Vol. 36, No. 9, pp. 41?98.
Briand D., Krauss A. and van der Schoot (2000), “Design and fabrication of high-temperature microhotplates for drop-coated gas sensors”, Journal of sensors and actuators, Vol. 68, No. 9, pp. 223-233.
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UCI(KEPA) : I410-ECN-0101-2018-569-003336448