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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 International Journal of Control Automation and Systems International Journal of Control Automation and System Vol.5 No.1
- 발행연도
- 2007.2
- 수록면
- 35 - 42 (8page)
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초록· 키워드
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This paper presents an INS (Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer (DRXL) manufactured by an epitaxially grown thick polysilicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 ㎐/g and its long term bias stability is about 2 ㎎ (1σ) with dynamic range of σ 70g.
목차
Abstract
1. INTRODUCTION
2. TORSIONAL-TYPE MEMS ACCELEROMETER STRUCTURE
3. OPERATIONAL PRINCIPLES AND DYNAMICS SIMULATION
4. OSCILLATION LOOP ANALYSIS AND DESIGN
5. PERFORMANCE TEST
6. CONCLUSION
REFERENCES
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UCI(KEPA) : I410-ECN-0101-2010-560-002076015