Application of Ar Gas Cluster Ion Beam Sputtering to surface analysis for oxide thin films

Chanae Pa ,  k ,  Kangil Lee 외 2명

한국진공학회 학술발표회초록집

2014 .08

Ion beam characteristics in Hall thruster plasma for space application

김호락

한국진공학회 학술발표회초록집

2019 .08

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

SPT 업홀기법을 이용한 지반의 2차원 전단파 속도 분포 도출

김동수 ,  방은석 ,  김종태

한국지구물리탐사학회 심포지움

2005 .01

Inductively Coupled Plasma Reactive Ion Etching of MgO Thin Films Using a CH₄/Ar Plasma

Hwa Won Lee ,  Eun Ho Kim ,  Tae Young Lee 외 1명

한국진공학회 학술발표회초록집

2011 .02

Surface properties of Nb oxide thin films prepared by rf sputtering

박주연 ,  강용철

한국진공학회 학술발표회초록집

2016 .02

New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication : Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

Mun Pyo Hong

한국진공학회 학술발표회초록집

2012 .02

低Ar 가스 壓力에서 製作한 Cr 下地層위에 Co基 合金薄膜媒體의 結晶配向과 磁氣特性

박진규 ,  천과상 ,  중천무수 외 1명

한국자기학회 학술연구발표회 논문개요집

1991 .05

A Study on Properties of RF-sputtered Al-doped ZnO Thin Films Prepared with Different Ar Gas Flow Rates

Seung Ik Han ,  Hong Bae Kim

Applied Science and Convergence Technology

2016 .11

High density plasma etching of MgO thin films in Cl₂/Ar gases

Y. B. Xiao ,  E. H. Kim ,  S. M. Kong 외 1명

한국진공학회 학술발표회초록집

2010 .02

Nitrogen - incorporated (Ba, Sr)TiO₃ thin films fabricated by r.f. - magnetron sputtering

Won Taeg Lim ,  Yong Kuk Jeong ,  Chang Hyo Lee

Journal of Korean Vacuum Science & Technology

2000 .12

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02

SPUTTERING PRESSURE EFFECTS ON MAGNETIC ANISOTROPY IN Co / Pt MULTILAYERS

Jin-Hong Kim ,  Sung-Chul Shin

한국자기학회지

1995 .10

Annealing Effects of Indium Tin Oxide films grown on glass by radio frequency magnetron sputtering technique

M. H. Jang ,  J. M. Choi ,  C. N. Whang 외 2명

Applied Science and Convergence Technology

2005 .09

Annealing behavior of the Pt films sputtered with Ar / N₂gas mixture by real - time, in situ ellipsometry

이동수 ,  박동연 ,  우현정 외 4명

한국진공학회 학술발표회초록집

2000 .02

The optical and mechanical properties of Al doped zinc oxide thin film fabricated by high power impulse magnetron sputtering

Yu-Ci HONG ,  Jyh-Wei LEE ,  Bih-Show LOU

한국진공학회 학술발표회초록집

2016 .08

The transient sputtering yield change of an amorphous Si layer by low energy O₂+ and Ar+ ion bombardment

Hye Chung Shin ,  Hee Jae Kang ,  Hyung Ik Lee 외 1명

Applied Science and Convergence Technology

2003 .10

Epitaxial growth of Tin Oxide thin films deposited by powder sputtering method

백은하 ,  김소진 ,  강현철

한국진공학회 학술발표회초록집

2015 .08

Effect of Ar ion Sputtering on the Surface Electronic Structure of Indium Tin Oxide

Hyunbok Lee ,  Sang Wan Cho

Applied Science and Convergence Technology

2016 .11

Effects of the Ar pressure on the magnetic and magnetocaloric properties of sputtered Er-Co thin films

Mi ,  i Kim ,  Myung-Hwa Jung 외 2명

한국자기학회 학술연구발표회 논문개요집

2014 .11