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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2005.9
- 수록면
- 159 - 164 (6page)
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Indium tin oxide (ITO) films were deposited on a glass slide at a thickness of 280 nm by radio frequency(rf) magnetron sputtering from a ceramic target composed of In₂O₃ (90%) + SnO₂ (10%). We investigated the effects of the annealing temperature (T_a) between 200 and 350 ℃ for 30 min in air on such properties as thermal stability, surface morphology, and crystal structure of the films. X-ray diffraction spectra revealed that all the films were oriented preferably with [222] direction and [440] direction and the peak intensity increased with increasing annealing temperature. X-ray photoelectron spectroscopy (XPS) showed that the sodium was out-diffused from the glass substrate at the annealing temperature of 350℃. The sodium composition of the ITO film annealed at 350℃ for 30 min was 2.5% at the surface. Also the sodium peak almost disappeared after 3 keV Ar^+ sputtering for 6 min. The visible transmittance of all ITO films was over 77%.
목차
Abstract
1. Introduction
2. Experiment
3. Results and Discussion
4. Conclusions
References
참고문헌 (3)
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