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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.29 No.6
- 발행연도
- 2020.11
- 수록면
- 125 - 132 (8page)
이용수
초록· 키워드
오류제보하기
A brief review of the electron collision studies of perfluorocarbons and SF₆ relevant to plasma is presented. The use of these gases in various applications of plasma is highlighted, and their possible replacement with gases that have a low global warming potential is suggested. The results for a few simple fluorocarbons are presented, i.e., C₂F₂, C₃F₄, and C₄F₆ for elastic scattering and C₂F₆ for ionization, and the requirement for further investigation is highlighted. This review is not extensive; however, it presents an important step towards understanding the lack of cross-section data for numerous fluorocarbon molecules/radical species. In addition, it highlights the requirement for the detailed study of fluoroketones and fluoronitriles, which are possible substitutes for SF₆ for various electron collisional processes other than ionization.
목차
ABSTRACT
1. Introduction
2. Theoretical methods
3. Results and discussion
4. Conclusion
References
참고문헌 (139)
참고문헌 신청
I. Adamovich / 2017 / J. Phys. D : Appl. Phys 50:323001
A. Zecca / 1987 / J. Phys. B: At. Mol. Phys 20:L133
L. G. Christophorou / 2012 / Fundamental Electron Interactions with Plasma Processing Gases / Springer Science &Business Media
L. G. Christophorou / 2013 / Electron–Molecule Interactions and Their Applications / Academic Press
X. W. Li / 2018 / J. Phys. D : Appl. Phys 51:153001
A. Zecca / 1987 / J. Phys. B: At. Mol. Phys 20:L133
L. G. Christophorou / 2012 / Fundamental Electron Interactions with Plasma Processing Gases / Springer Science &Business Media
L. G. Christophorou / 2013 / Electron–Molecule Interactions and Their Applications / Academic Press
X. W. Li / 2018 / J. Phys. D : Appl. Phys 51:153001
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