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반도체 가공 작업환경에서 부산물로 발생되는 주요 금속산화물의 입자 크기, 형상, 결정구조에 따른 독성 고찰
Size, Shape, and Crystal Structure-dependent Toxicity of Major Metal Oxide Particles Generated as Byproducts in Semiconductor Fabrication Facility
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국산업보건학회 (구 한국산업위생학회) 한국산업보건학회지 한국산업보건학회지 제26권 제2호 KCI등재
- 발행연도
- 2016.1
- 수록면
- 119 - 138 (20page)
이용수
반도체 가공 작업환경에서 부산물로 발생되는 주요 금속산화물의 입자 크기, 형상, 결정구조에 따른 독성 고찰
초록· 키워드
오류제보하기
Objectives: The purpose of this study is to review size, shape, and crystal structure-dependent toxicity of major metal oxide particles such as silicon dioxide, tungsten trioxide, aluminum oxide, and titanium dioxide as byproducts generated in semiconductor fabrication facility. Methods: To review the toxicity of major metal oxide particles, we used various reported research and review papers. The papers were searched by using websites such as Google Scholar and PubMed. Keyword search terms included '$SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$) toxicity', 'health effects $SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$). Additional papers were identified in references cited in the searched papers. Results: In various cell lines and organs of human and animals, cytotoxicity, genotoxicity, hepatoxicity, fetotoxicity, neurotoxicity, and histopathological changes were induced by silicon dioxide, tungsten trioxide, aluminium oxide, and titanium dioxide particles. Differences in toxicity were dependent on the cell lines, organs, doses, as well as the chemical composition, size, surface area, shape, and crystal structure of the particles. However, the doses used in the reported papers were higher than the possible exposure level in general work environment. Oxidative stress induced by the metal oxide particles plays a significant role in the expression of toxicity. Conclusions: The results cannot guarantee human toxicity of the metal oxide particles, because there is still a lack of available information about health effects on humans. In addition, toxicological studies under the exposure conditions in the actual work environment are needed.
목차
등록된 정보가 없습니다.
참고문헌 (93)
참고문헌 신청
Agency for Toxic Substances and Disease Research (ATSDR) / 2005 / Toxicological Profile for Tungsten / US Department of Health and Human Services, Public Health Service
Alexander Jr FA / 2012 / Real-time impedance analysis of silica nanowire toxicity on epithelial breast cancer cells / Aaalyst 137:5823~5828
2008 / TLVs and BEIs. Threshold Limit Values for Chemical Substances and Physical Agents and Biological Exposure Indices / American Conference of Government Industrial Hygienists (ACGIH)
2001 / Tungsten and Compounds / American Conference of Government Industrial Hygienists (ACGIH)
2015 / TLV and BEIs / American Conference of Government Industrial Hygienists (ACGIH)
Alexander Jr FA / 2012 / Real-time impedance analysis of silica nanowire toxicity on epithelial breast cancer cells / Aaalyst 137:5823~5828
2008 / TLVs and BEIs. Threshold Limit Values for Chemical Substances and Physical Agents and Biological Exposure Indices / American Conference of Government Industrial Hygienists (ACGIH)
2001 / Tungsten and Compounds / American Conference of Government Industrial Hygienists (ACGIH)
2015 / TLV and BEIs / American Conference of Government Industrial Hygienists (ACGIH)
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