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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.29 No.3
- 발행연도
- 2020.5
- 수록면
- 62 - 66 (5page)
이용수
초록· 키워드
오류제보하기
In plasma discharge simulation, the configuration of a mesh has a significant influence on convergence. However, it is time consuming to obtain a suitable mesh. We thus propose a module approach that automatically adjusts a mesh at a specific location as the calculation proceeds. It was confirmed that the mesh is adjusted in a direction that reduces the probability of an error. The adaptive mesh refinement and coarsening method was applied to the Poisson equation module of a three-dimensional capacitively coupled plasma equipment model for semiconductors. By comparing the respective results of the adaptive mesh and fixed mesh models, we confirmed that the error of the electric potential value decreases.
목차
ABSTRACT
1. Introduction
2. Model description
3. Results and discussion
4. Conclusions
References
참고문헌 (16)
참고문헌 신청
M. A. Lieberman / 1994 / Principles of Plasma Discharges and Materials Processing / Wiley
T. Makabe / 2006 / Plasma Electronics: Applications in Microelectronic Device Fabrication / Taylor and Francis
Y. Ohtsu / 2018 / Plasma Science and Technology - Basic Fundamentals and Modern Applications / IntechOpen
L. L. Alves / 2012 / Plasma Phys. Control. Fusion 54:124012
E. Kawamura / 2016 / Plasma Sources Sci. Technol 25:035007
T. Makabe / 2006 / Plasma Electronics: Applications in Microelectronic Device Fabrication / Taylor and Francis
Y. Ohtsu / 2018 / Plasma Science and Technology - Basic Fundamentals and Modern Applications / IntechOpen
L. L. Alves / 2012 / Plasma Phys. Control. Fusion 54:124012
E. Kawamura / 2016 / Plasma Sources Sci. Technol 25:035007
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UCI(KEPA) : I410-ECN-0101-2020-420-000691730