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이용수
Abstract
1. Mevva Ion Source and Ion Implanter
2. The Magnetic Filtered Thin - Film Deposition System
Acknowledgements
References
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Filtered Plasma Deposition and MEVVA Ion Implantation
Applied Science and Convergence Technology
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Development of High Flux Metal Ion Plasma Source for the Ion Implantation and Deposition
Journal of Korean Vacuum Science & Technology
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Surface Processing of Components and Tools by MEVVA Source Ion Implantation
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Composition Depth Profiling of Fe/Ni and Pt/Co Multilayers Using a Buckminsterfullerene (C60) Ion
한국진공학회 학술발표회초록집
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Modification of electronic properties of graphene by using low-energy K+ ions
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Conformation of CRISPR-associated Csn2 DNA-binding Ring Is Regulated by Milimolar Concentration of Ca2+ Ion
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Ion Beam Energy effect of the Carbon Nitride Thin Film formation by Direct Dual Ion Beam Deposition
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Plasma Source Ion Implantation - A Three Dimensional Ion Implantation Technique
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