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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Journal of Korean Vacuum Science & Technology Journal of Korean Vacuum Science & Technology Vol.5 No.1
- 발행연도
- 2001.7
- 수록면
- 19 - 24 (6page)
이용수
초록· 키워드
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The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measurements of the ion source are represented. The integral parameters such as electron energy distribution function(EEDF), electron density and mean electron energy, discharge voltage-current characteristics, and distribution of ion beam were studied.
목차
Abstract
1. Introduction
2. Fabrication of the ion source with cold cathode
3. Experimental procedure
4. Results of plasma and integral parameters measurements
5. Results of the ion beam profile measurements
6. Conclusion
References
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