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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제8권 제4호
- 발행연도
- 2007.1
- 수록면
- 153 - 156 (4page)
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Structural and electrical properties of the fully crystallized-bismuth magnesium niobate (Bi2Mg2/3Nb4/3O7, BMN) films with 15 mol% excess bismuth deposited on Pt bottom electrode by pulsed laser deposition are characterized for various deposition temperatures. The BMN films were crystallized with a monoclinic structure from 300oC and the surface roughness slightly decreases with increasing deposition temperature. The capacitance density of the films increases with increasing deposition temperature and especially, films deposited at 400oC exhibit a capacitance density of approximately 620 nF/cm2. The crystallized BMN films with approximately 170 nm thickness exhibit breakdown strength above 600 kV/cm (≤ 10 V) irrespective of deposition temperature and a leakage current density of approximately 2 x 10-8 A/cm2 at 590 kV/cm (at 10 V).
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참고문헌 (7)
참고문헌 신청
/ 1996 / Investigation of the dielectric properties of bismuth pyrochlores 100 : 529 ~
/ 2002 / Bi2O3 solubility of Bi-based pyrochlores and related phases 17 : 1178 ~
/ 2006 / Bismuth-based pyrochlore thin films deposited at low temperatures for embedded capacitor applications 45 : 7325 ~
/ 2006 / Realization of a high capacitance density in Bi2Mg2/3Nb4/3O7 pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applications 89 :
/ 2007 / Effect of thickness on electrical properties of bismuth-magnesium niobate pyrochlore thin films deposited at low temperature 101 : 084114 ~
/ 2002 / Bi2O3 solubility of Bi-based pyrochlores and related phases 17 : 1178 ~
/ 2006 / Bismuth-based pyrochlore thin films deposited at low temperatures for embedded capacitor applications 45 : 7325 ~
/ 2006 / Realization of a high capacitance density in Bi2Mg2/3Nb4/3O7 pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applications 89 :
/ 2007 / Effect of thickness on electrical properties of bismuth-magnesium niobate pyrochlore thin films deposited at low temperature 101 : 084114 ~
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