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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2007.1
- 수록면
- 342 - 347 (6page)
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Bi6Mg2Nb4O21(BMN) thin films were deposited at various substrates by sputtering system for embedded capacitor applications. BMN thin films deposited at room temperature are manufactured as MIM(Metal/Insulator/Metal) structures. Dielectric properties and leakage current density were investigated as a function of various substrates and thickness of BMN thin films. Leakage current density of BMN thin films deposited on CCL(Copper Clad Laminates) showed relatively high value (1x10-3 A/cm2) at an applied field of 300 kV/cm on substrates, possibly due to relatively high value of roughness(rms 50 Å) of CCL substrates. 100 nm-thick BMN thin films deposited on Cu/Ti/Si substrates showed the capacitance density of 300 nF/cm2, a dielectric constant of 32, a dielectric loss of 2 % at 100 kHz and the leakage current density of 1x10-6 A/cm2 at an applied field of 300 kV/cm. BMN capacitors are expected to be promising candidates as embedded capacitors for printed circuit board(PCB).
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참고문헌 (6)
참고문헌 신청
J. H. Park / 2006 / Bismuth-based pyrochlore thin films deposited at low temperatures for embedded capacitor applications / Japanese J. of Applied Physics (in English) 45 (9B
J. H. Park / 2006 / Realization of a high capacitance density in Bi2Mg2/3Nb4/3O7 pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applica
J. P. Maria / 2001 / Lead zirconate titanate thin films on base-metal foils : an approach for embedded high- permittivity passive components / J. of the American Ceramic Soci
M. A. Kakimoto / 2006 / Polymer-ceramic nanocomposites based on new concepts for embedded capacitor / Materials Science & Engineering B (in English) 132 : 74 ~
T. KIM / 2004 / Ca-doped lead zirxonate titanate thin film capacitors on base metal nickel on copper foil / J. Mater. Res (in English) 19 (10) : 2841 ~
J. H. Park / 2006 / Realization of a high capacitance density in Bi2Mg2/3Nb4/3O7 pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applica
J. P. Maria / 2001 / Lead zirconate titanate thin films on base-metal foils : an approach for embedded high- permittivity passive components / J. of the American Ceramic Soci
M. A. Kakimoto / 2006 / Polymer-ceramic nanocomposites based on new concepts for embedded capacitor / Materials Science & Engineering B (in English) 132 : 74 ~
T. KIM / 2004 / Ca-doped lead zirxonate titanate thin film capacitors on base metal nickel on copper foil / J. Mater. Res (in English) 19 (10) : 2841 ~
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