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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2009.1
- 수록면
- 290 - 296 (7page)
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Bi⁴Ti₃O12 (BiT) thin films were grown on the Pt/Ti/SiO₂/Si substrate using a metal organic decomposition (MOD) method. Effects of oxygen annealing on the structural properties and dielectric properties of the BiT thin films were investigated. The BiT films were well developed when rapid thermal annealed at >500℃ in oxygen ambient. For the film annealed at 700℃, no crystalline phase was observed under oxygen free annealing atmosphere while its crystallinity was significantly enhanced as the oxygen pressure increased. The BiT film also exhibited a smooth surface with defect free grains. A high dielectric constant and a low dielectric loss were achieved satisfactory in the frequency range from 75 kH₂ to 1 MH₂. Especially, the BiT film, annealed at 700℃ and 10 torr oxygen pressure, showed good dielectric properties: dielectric constant of 51 and dielectric loss of 0.2 % at 100 kHz. Its leakage current was also considerably improved, being as 0.62 nA/cm₂ at 1 V. Therefore, it is considered that the oxygen annealing has effects on an enhancement of crystallinity and dielectric properties of the BiT films.
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참고문헌 (12)
참고문헌 신청
A. Z. Simoes / 2006 / Electromechanical properties of calcium bismuth titanate films:A potential candidate for lead-free thin-film piezoelectrics / Appl. Phys. Lett. 88 : 072
C.-R. Cho / 2002 / Na0.5K0.5NbO3 thin films for voltage controlled acoustoelectric device applications / Appl. Phys. Lett. 80 : 3171 ~
E. I. Speranskaya / 1965 / Bi2O3-TiO2 system / Inorg. Mater. 1 (2) : 232 ~
E.Kato / 1996 / Preparation of highly oriented Bismuth titanate thin films by sol-gel process / J. Ceram. Soc. Jpn. 104 : 1015 ~
F. Marco / 2006 / Modeling,fabrication and performance measurements of a piezoelectric energy converter for power harvesting in autonomous microsystems / IEEE Trans. on Instr
C.-R. Cho / 2002 / Na0.5K0.5NbO3 thin films for voltage controlled acoustoelectric device applications / Appl. Phys. Lett. 80 : 3171 ~
E. I. Speranskaya / 1965 / Bi2O3-TiO2 system / Inorg. Mater. 1 (2) : 232 ~
E.Kato / 1996 / Preparation of highly oriented Bismuth titanate thin films by sol-gel process / J. Ceram. Soc. Jpn. 104 : 1015 ~
F. Marco / 2006 / Modeling,fabrication and performance measurements of a piezoelectric energy converter for power harvesting in autonomous microsystems / IEEE Trans. on Instr
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