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논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride
한국진공학회 학술발표회초록집
2016 .08
Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature
한국진공학회 학술발표회초록집
2016 .08
Plasma etching of gallium nitride at high temperature
한국진공학회 학술발표회초록집
2016 .08
습식패턴 에칭공정에 의한 Anti Glare 표면형상 제어
한국진공학회 학술발표회초록집
2017 .02
Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition
한국진공학회 학술발표회초록집
2015 .02
Realization of efficient barrier performance of a silicon nitride film simply via plasma chemistry
한국진공학회 학술발표회초록집
2017 .02
Etching properties of titanium nitride thin films in a O₂/Cl₂/Ar plasma
한국진공학회 학술발표회초록집
2016 .08
Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
한국진공학회 학술발표회초록집
2016 .02
Micro-pyramidal structure fabrication by Si (100) KOH wet etching
한국진공학회 학술발표회초록집
2017 .02
Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges
Applied Science and Convergence Technology
2024 .09
Contact block copolymer technique을 이용한 실리콘 나노-필라 구조체 제작방법
한국진공학회 학술발표회초록집
2015 .08
Controlling the surface energy and electrical properties of carbon films deposited using unbalanced facing target magnetron sputtering plasmas
한국진공학회 학술발표회초록집
2015 .08
High power impulse magnetron sputtering for obtaining cubic aluminum nitride on aluminum
한국진공학회 학술발표회초록집
2016 .08
Characteristics of SiO₂ Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C7F14, C7F8) and Fluorocarbon Gas (C₄F8)
Applied Science and Convergence Technology
2021 .07
Etching for Vertical Sidewall Formation in TiO₂ Nanorods
Applied Science and Convergence Technology
2022 .09
Thickness effect of ITO thin films deposited by RF magnetron sputtering on nano-textured surface of c-Si solar cell
한국진공학회 학술발표회초록집
2016 .08
Behaviour of nitrided layer formed on S45C carbon steel during gaseous nitriding
한국진공학회 학술발표회초록집
2016 .02
Effects of surface etching on microstructure and mechanical strength of carbon fibers
Carbon letters
2018 .01
Low-temperature PECVD silicon nitride film for the fabrication of capacitance type pressure sensor
한국진공학회 학술발표회초록집
2016 .08
원자층 식각기술
한국진공학회 학술발표회초록집
2015 .02
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