PS-b-PMMA block copolymer etching using neutral beam

Jinwoo PARK ,  Kihyun KIM ,  Deokhyun YUN 외 2명

한국진공학회 학술발표회초록집

2016 .08

A study on the ion beam etching characteristics in the high aspect ratio contact

Ilhyeong LEE ,  Jongkyu KIM ,  Jongsoon PARK 외 6명

한국진공학회 학술발표회초록집

2016 .08

Controlling Nanostructures of Block Copolymers Under Various Conditions

Jong Yeon Kim ,  Dongsup Song ,  Doo Hyun Baik 외 1명

한국분석과학회 학술대회

2023 .05

3D characterization for the structure of various diblock copolymer films obtained by surface analysis techniques

Minhwa Kang ,  Jihye Lee ,  Yeonhee Lee

한국진공학회 학술발표회초록집

2018 .08

Sub-10 nm 수직 배향 DSA etch profile 향상에 대한 연구

오지수 ,  김교운 ,  김희주 외 3명

한국진공학회 학술발표회초록집

2020 .02

Controlled morphology of high-χ block copolymers by using multi-step annealing

최영중 ,  서준호 ,  박성민 외 2명

한국진공학회 학술발표회초록집

2020 .08

Study on nano-structuring characteristics on PEN film surface by oxygen ion beam treatment

양준영 ,  변은연 ,  이승훈 외 2명

한국진공학회 학술발표회초록집

2019 .08

Quantitative control of the surface chemistry of magnetron-deposited silicon nitride etched with various wet treatments

Ma ,  ine BRUNET ,  Damien AUREAU 외 7명

한국진공학회 학술발표회초록집

2016 .08

Mechanical Properties of High Stressed Silicon Nitride Beam Measured by Quasi-static and Dynamic Techniques

Dong Hoon Shin ,  Hakseong Kim ,  Ki 외 8명

한국진공학회 학술발표회초록집

2016 .02

A study on the phenomenon of non uniformity at isolate pattern using ion beam etching

Jongsoon PARK ,  Jongkyu KIM ,  Sangkuk KIM 외 7명

한국진공학회 학술발표회초록집

2016 .08

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Plasma etching of gallium nitride at high temperature

Zecheng LIU ,  Keigo TAKEDA ,  Hi 외 6명

한국진공학회 학술발표회초록집

2016 .08

Ion Beam Etching (IBE) system에서의 Radical 제어 연구

김두산 ,  김건우 ,  장윤종 외 6명

한국진공학회 학술발표회초록집

2020 .08

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Atomic layer deposition of high-k dielectrics on graphene through controlled Ar⁺ Ion beam process

You Jin JI ,  Ki Seok KIM ,  Ki Hyun KIM 외 2명

한국진공학회 학술발표회초록집

2016 .08

Surface hardening of tool steel by plasma nitriding with ion/particle bombardment and its wear behavior

Kyun-Taek Cho ,  Seok-Won Son ,  Won-Beom Lee

한국진공학회 학술발표회초록집

2015 .02

ToF-SIMS imaging of block copolymers in combination with AFM : what are the new ways for 3D chemical characterization?

Tanguy TERLIER ,  Minjung KIM ,  Jihye LEE 외 1명

한국진공학회 학술발표회초록집

2016 .08

Electron beam patterning with Vertically Aligned CNTs (C-beam) for next generation lithography

Alfi Rodiansyah ,  Kyu Chang Pa ,  k

한국진공학회 학술발표회초록집

2021 .02

Effect of Metal Structure on Silicon Nanowire Fabrication Using Metal-assisted Etching

Jungkil Kim

새물리

2021 .12

Ion beam figuring with focused anode layer thruster

Oleksii Gi ,  ka ,  Soo Ouk Jang 외 3명

한국진공학회 학술발표회초록집

2020 .08