Nanostructured Thin Films with Shape-Related Useful Properties

Motofumi Suzuki

한국진공학회 학술발표회초록집

2017 .08

Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Development of a thin-film deposition system for X-ray mirror coating

김정수 ,  임준 ,  김종현 외 1명

한국진공학회 학술발표회초록집

2021 .02

Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering

Jiwon Choi ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

라디오파 마그네트론 스퍼터링으로 성장한 CaWO₄:Dy³⁺ 박막의 광학, 구조, 표면 특성

조신호

새물리

2023 .10

Bulk and Surface of Al2O3 doped ZnO Films at Different Target Angles by DC magnetron sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System

Tae Hyung Kim ,  Geun Young Yeom

Applied Science and Convergence Technology

2019 .09

SiO2 and TiO2 thin film deposited by DC pulsed magnetron sputtering with the process variable working pressure

Hye jin jeong ,  Moon Suhk Suh

한국진공학회 학술발표회초록집

2018 .08

Structure-Zone Modeling of Sputter-Deposited Thin Films : A Brief Review

Eiji Kusano

Applied Science and Convergence Technology

2019 .11

X-ray scattering and X-ray reflectivity investigations on RF-sputtering grown SrVO₃ thin films

Byeong-Hyeon Lee ,  Weon Cheol Lim ,  Bum Jin Yang 외 7명

한국진공학회 학술발표회초록집

2017 .02

Structural and morphological properties change of Zn and Sn thin films by sputter time

이석희 ,  박주연 ,  최아롬 외 3명

한국진공학회 학술발표회초록집

2017 .02

Automation of dc magnetron sputtering system using real-time thickness monitor

S. H. Lee ,  Sug-Bong Choe

한국자기학회 학술연구발표회 논문개요집

2019 .11

Sputter-deposition of lead oxide on large and textured substrate

이원규 ,  황재근 ,  이상원 외 6명

한국진공학회 학술발표회초록집

2020 .02

Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Mechanisms involved in modification of film structure and properties in ICP assisted dc and pulsed dc sputtering

Eiji Kusano

한국진공학회 학술발표회초록집

2015 .08

Crystal Properties of TiO2 Thin Films Grown at Low Temperatures by Reactive DC Magnetron Sputtering

Hyeok Jee ,  Jin-Soo Kim

새물리

2019 .02

Deposition technique of IGZO film for large sputtering cathode

Yasuo OOKUBO ,  Makoto ARAI ,  Junya KIYOTA 외 1명

한국진공학회 학술발표회초록집

2016 .08

Preparation of Fe and Cr doped Ag thin films with high reflectivity by magnetron sputtering for LED reflectors

Chad ,  asekha ,  LOKA 외 2명

한국진공학회 학술발표회초록집

2016 .08

Thermoelectric and electrical properties of IZO and ITO thin films deposited by DC magnetron sputtering

Jayoung BYEON ,  Pungkeun SONG

한국진공학회 학술발표회초록집

2016 .08

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02