지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.28 No.6
- 발행연도
- 2019.11
- 수록면
- 179 - 185 (7page)
이용수
초록· 키워드
오류제보하기
In this paper, the structure zone model (SZM) for sputter-deposited thin films is reviewed through a systematic discussion of the dependence of film structure and properties on the discharge pressure and homologous substrate temperature. The SZM is applicable to the sputter-deposited metal and metal oxide thin films with a film thickness ranging from a few to several hundred nanometers. Furthermore, the SZM is evolved for the sputter-deposition of films through energization of the sputtered particles by replacing the axis of the deposition pressure with that of the effective energy per depositing atom. The results suggest that the SZM is valid as a conceptual diagram with respect to optimizing film-deposition conditions for industrial applications.
목차
ABSTRACT
Ⅰ. Introduction
Ⅱ. Structure Zone Model
Ⅲ. Structure and Properties of Sputter-Deposited Metal and Oxide Thin Films
Ⅳ. SZM Evolution
Ⅴ. Conclusions
References
참고문헌 (0)
참고문헌 신청함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Sputtering 공정 중 발생 된 in-film defect 분석 방법
한국진공학회 학술발표회초록집
2017 .02
-
Epitaxial growth of Tin Oxide thin films deposited by powder sputtering method
한국진공학회 학술발표회초록집
2015 .08
-
Structural and morphological properties change of Zn and Sn thin films by sputter time
한국진공학회 학술발표회초록집
2017 .02
-
SiO2 and TiO2 thin film deposited by DC pulsed magnetron sputtering with the process variable working pressure
한국진공학회 학술발표회초록집
2018 .08
-
Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering
한국진공학회 학술발표회초록집
2016 .02
-
Surface properties of Nb oxide thin films prepared by rf sputtering
한국진공학회 학술발표회초록집
2016 .02
-
Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering
한국진공학회 학술발표회초록집
2021 .02
-
Deposition technique of IGZO film for large sputtering cathode
한국진공학회 학술발표회초록집
2016 .08
-
Sputter-deposition of lead oxide on large and textured substrate
한국진공학회 학술발표회초록집
2020 .02
-
Study of Chromium thin films deposited by DC magnetron sputtering under glancing angle deposition at low working pressure
한국진공학회 학술발표회초록집
2015 .08
-
A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System
Applied Science and Convergence Technology
2019 .09
-
Development of a thin-film deposition system for X-ray mirror coating
한국진공학회 학술발표회초록집
2021 .02
-
Characteristics of the ZnO thin film transistors deposited by a sputter and solution process
한국진공학회 학술발표회초록집
2018 .02
-
Characteristics of InZnSnO thin films deposited by a dual magnetron sputtering method for thin films transistor
한국진공학회 학술발표회초록집
2016 .08
-
라디오파 마그네트론 스퍼터링으로 성장한 CaWO₄:Dy3+ 박막의 광학, 구조, 표면 특성
새물리
2023 .10
-
Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering
한국진공학회 학술발표회초록집
2016 .08
-
Formation of Crystalline Copper Thin Films by a Sputtering-assisted Magnetic Field System at Room Temperature
Applied Science and Convergence Technology
2018 .01
-
Strain evolution in Tin Oxide thin films deposited by powder sputtering method
한국진공학회 학술발표회초록집
2016 .02
-
Preparation of functional material thin films by sputtering method for semiconductor and electronics applications
한국진공학회 학술발표회초록집
2016 .08
-
Ferromagnetic Resonance study on Yttrium Iron Garne (Y₃Fe5O12) Thin Films
한국자기학회 학술연구발표회 논문개요집
2024 .05
이 논문의 저자 정보
이 논문과 함께 이용한 논문
Effect of O₂ Concentration on the Characteristics of IZO Thin Film for Solar Cell Transparent Electrode Deposited at Low Temperature by RF Magnetron Sputtering
Somin Pa
,
k
,
Yewon Cha
외 5명
AFORE
2021
.10
증착압력에 따른 Titanium 코팅 특성평가에 관한 연구
김도현
,
전중호
,
양진호
외 2명
대한기계학회 춘추학술대회
2021
.11
Plasma damage-free sputtering of transparent cathodes for semi-transparent perovskite solar cells
Han-Ki Kim
한국표면공학회 학술발표회 초록집
2021
.06
[Invited Review] 고효율 태양전지 적용을 위한 저온 투명전극 소재 연구현황 리뷰
박형식
,
김영국
,
오동현
외 3명
신·재생에너지
2021
.03
The Characteristics of CIGS Thin-Film Solar Cells Using Sputtering Based Two-Step Process
Young-Ill Kim
,
Dong-Hwan Jeon
,
Si-Nae Pa
외 12명
AFORE
2019
.11
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2020-420-000200720