Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Characterization of AZO thin films grown on various substrates by using facing target sputtering system

이창현 ,  손선영 ,  배강 외 2명

한국진공학회 학술발표회초록집

2015 .08

RF Magnetron Sputtering를 이용한 a축 ZnO:Al 박막의 구조적, 전기적 특성 연구

Junyoung Kang ,  Hyeongsik Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2015 .02

High Work Function of AZO Fhin Films as Insertion Layer between TCO and p-layer and Its Application of Solar Cells

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Electrical and optical properties of Ga-doped ZnO thin films prepared by RF magnetron Co-sputtering systems

Nam-Jung KIM ,  Naeho SHIN ,  Chang-Su HWANG

한국진공학회 학술발표회초록집

2016 .08

A Study on Properties of RF-sputtered Al-doped ZnO Thin Films Prepared with Different Ar Gas Flow Rates

Seung Ik Han ,  Hong Bae Kim

Applied Science and Convergence Technology

2016 .11

The deposition temperature effects of ZnO buffer layers on the properties of ZnO:(Al,P) thin films by RF-magnetron sputtering

신승학 ,  이준형 ,  허영우 외 1명

한국진공학회 학술발표회초록집

2015 .02

Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Structural and morphological properties change of Zn and Sn thin films by sputter time

이석희 ,  박주연 ,  최아롬 외 3명

한국진공학회 학술발표회초록집

2017 .02

Characteristics of Ga doped ZnO Thin Films Deposited by RF Magnetron Sputtering with Base Pressure

Deok Kyu Kim

Applied Science and Convergence Technology

2019 .01

The effect of ZnO buffer layer on the structural and electrical properties in the ZnO:(Al,P) thin films by the RF-magnetron sputtering

김창훈 ,  신승학 ,  이준형 외 2명

한국진공학회 학술발표회초록집

2017 .02

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02

A study on the optical and electrical properties of nickel oxide thin films deposited by reactive magnetron sputtering process

Seong woo Jang ,  Sehoon Hwang ,  Sang-Ho Lim 외 1명

한국진공학회 학술발표회초록집

2017 .02

The optical and mechanical properties of Al doped zinc oxide thin film fabricated by high power impulse magnetron sputtering

Yu-Ci HONG ,  Jyh-Wei LEE ,  Bih-Show LOU

한국진공학회 학술발표회초록집

2016 .08

Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering

Jiwon Choi ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

Study of Chromium thin films deposited by DC magnetron sputtering under glancing angle deposition at low working pressure

Kwang-Jin Bae ,  Jae-Hoon Ju ,  Young-Rae Cho

한국진공학회 학술발표회초록집

2015 .08

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

Mechanisms involved in modification of film structure and properties in ICP assisted dc and pulsed dc sputtering

Eiji Kusano

한국진공학회 학술발표회초록집

2015 .08

Crystal Properties of TiO2 Thin Films Grown at Low Temperatures by Reactive DC Magnetron Sputtering

Hyeok Jee ,  Jin-Soo Kim

새물리

2019 .02

Automation of dc magnetron sputtering system using real-time thickness monitor

S. H. Lee ,  Sug-Bong Choe

한국자기학회 학술연구발표회 논문개요집

2019 .11