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Microwave Electric Field and Magnetic Field Simulations of an ECR Plasma Source for Hyperthermal Neutral Beam Generation
한국진공학회 학술발표회초록집
2012 .02
Low Temperature Silicon Oxynitridation Grown by Hyperthermal Neutral Beam
한국진공학회 학술발표회초록집
2009 .08
Experimental Studies And Modeling Towards the Understanding of The Growth of DLC Films Hyperthermal Species
한국진공학회 학술발표회초록집
1998 .07
Heavy Ion - Surface Scattering at Hyperthermal Energies (3 - 100 eV). Cs+ Collisions on Si(111)
한국진공학회 학술발표회초록집
1995 .02
Silicon oxy-nitridation using the hyperthermal neutral beam (HNB)
한국진공학회 학술발표회초록집
2009 .02
Low - Temperature Si(001) Layer Grown Using Low - Energy Hyperthermal Si Atoms in UHV Ion - Beam Sputter Deposition : Epitaxial Thickness and Hydrogen Concentration
한국진공학회 학술발표회초록집
1999 .02
Hyperthermal Cs+ - Surface Reactive Scattering for Real - time Measurement of Molecular Adsorption. Reaction of CO, H₂O, and C6H6 with Ni(100)
한국진공학회 학술발표회초록집
1997 .02
Effects of High Neutral Beam Energy on the Properties of Amorphous Carbon Films
한국진공학회 학술발표회초록집
2012 .02
Influence of Neutral Particle Beam Energy on the Structural Properties of Amorphous Carbon Films Prepared by Neutral Particle Beam Assisted Sputtering
한국진공학회 학술발표회초록집
2011 .02
Effect of the Neutral Beam Energy on Low Temperature Silicon Oxide Thin Film Grown by Neutral Beam Assisted Chemical Vapor Deposition
한국진공학회 학술발표회초록집
2012 .08
Structural Properties of Si(113) surface
한국진공학회 학술발표회초록집
1999 .07
Improvement of electron field emission from carbon nanotube film by neutral beam treatment
한국진공학회 학술발표회초록집
2007 .08
In-situ magnetization measurements and ex-situ morphological analysis of electrodeposited cobalt onto chemical vapor deposition graphene/SiO<sub>2</sub>/Si
Carbon letters
2017 .01
Neutral Beam Splitter의 특성 연구
한국진공학회 학술발표회초록집
1992 .07
Properties of Copper Film on Si(100) and Si(111) Substrate by Ionized Cluster Beam Deposition (ICBD)
한국진공학회 학술발표회초록집
1996 .02
Simulation of neutral beam etching for material processing
한국진공학회 학술발표회초록집
2002 .02
Deposition of Nano Crystalline Silicon Thin Film by Using a Neutral Beam Method at Low Temperature
한국진공학회 학술발표회초록집
2008 .02
Si - O - C - H 저유전율 박막의 특성 연구 Study of Low - k Si - O - C - H Thin Films
한국진공학회 학술발표회초록집
1999 .07
Effect of F-based Neutral beam treatment on Al₂O₃ Gate Dielectrics
한국진공학회 학술발표회초록집
2008 .02
A study on He annealing effect in crystalline characteristics of Nc-Si:H thin film using neutral particle showering deposition
한국진공학회 학술발표회초록집
2018 .02
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