Effects of Neutral Particle Beam on Nano-Crystalline Silicon Thin Film Deposited by Using Neutral Beam Assisted Chemical Vapor Deposition at Room Temperature

Dong Hyeok Lee ,  Jin Nyoung Jang ,  Hyun Wook So 외 3명

한국진공학회 학술발표회초록집

2012 .08

Neutral Beam assisted Chemical Vapor Deposition at Low Temperature for n-type Doped nano-crystalline silicon Thin Film

장진녕 ,  이동혁 ,  소현욱 외 3명

한국진공학회 학술발표회초록집

2011 .02

Effect of the Neutral Beam Energy on Low Temperature Silicon Oxide Thin Film Grown by Neutral Beam Assisted Chemical Vapor Deposition

HyunWook So ,  DongHyeok Lee ,  JinNyoung Jang 외 1명

한국진공학회 학술발표회초록집

2012 .08

Effect of Hydrogen Neutral Beam Treatment on Nanocrystalline Silicon Thin-Film Transistors

이동혁 ,  장진녕 ,  홍문표

한국진공학회 학술발표회초록집

2014 .08

Highly Doped Nano-crystal Embedded Polymorphous Silicon Thin Film Deposited by Using Neutral Beam Assisted CVD at Room Temperature

장진녕 ,  이동혁 ,  소현욱 외 1명

한국진공학회 학술발표회초록집

2012 .08

Substrate temperature dependence of crystalline Y₂O₃ films grown by Ionized Cluster Beam Deposition

M.H.Cho ,  S.W.Whangbo ,  J.G.Seo 외 3명

한국진공학회 학술발표회초록집

1998 .02

Development of Nano Crystal Embedded Polymorphous Silicon Thin Film by Neutral Beam Assisted CVD Process at Room Temperature

Jin Nyoung Jang ,  Dong Hyeok Lee ,  Hyun Wook So 외 3명

한국진공학회 학술발표회초록집

2012 .02

Formation of silicon nanocrystallites by ion beam assisted electron beam deposition

Won Chel Choi ,  Eun Kyu Kim ,  Suk-Ki Min 외 3명

한국진공학회 학술발표회초록집

1998 .02

Correlation between Charged Silicon Nanoparticles in the Gas Phase and the Low Temperature Deposition of Crystalline Silicon Films during Hot Wire Chemical Vapor Deposition

유승완 ,  홍주섭 ,  김정형 외 2명

한국진공학회 학술발표회초록집

2014 .02

Effect of plasma treatments on the initial stage of micro - crystalline silicon thin film

장상철 ,  남창우 ,  홍진표 외 1명

한국진공학회 학술발표회초록집

1999 .07

Growth of epitaxial Al203 films on silicon by ionized beam deposition

Y. K. Choi ,  S. W. Whangbo ,  K. B. Chung 외 2명

한국진공학회 학술발표회초록집

2001 .02

A study on crystalline characteristics of Nc-Si:H thin film using neutral particle showering deposition

김현기 ,  최병덕

한국진공학회 학술발표회초록집

2018 .02

Effects of High Neutral Beam Energy on the Properties of Amorphous Carbon Films

이동혁 ,  장진녕 ,  권광호 외 3명

한국진공학회 학술발표회초록집

2012 .02

A study on bias dependence and uniformity of Nc-Si:H thin film using neutral particle showering deposition

김현기 ,  최병덕

한국진공학회 학술발표회초록집

2018 .08

ITO의 high Rs crystalline silicon solar cell으로의 적용에 대한 연구

유경열 ,  주민규 ,  김봉기 외 4명

한국진공학회 학술발표회초록집

2010 .08

Deposition of Cu films on Si substrate by Partially Ionized Beam deposition and Ion beam sputtering

Ki-Hwan Kim ,  Hong-Gui Jang ,  Sung Han 외 3명

한국진공학회 학술발표회초록집

1996 .02

Influence of Neutral Particle Beam Energy on the Structural Properties of Amorphous Carbon Films Prepared by Neutral Particle Beam Assisted Sputtering

이동혁 ,  장진녕 ,  권광호 외 3명

한국진공학회 학술발표회초록집

2011 .02

Strain measurement in the interface between crystalline Silicon and amorphous Silicon with MEIS

Yongho Ha ,  Sehun Kim ,  H.K. Kim 외 1명

한국진공학회 학술발표회초록집

1999 .07

Energy deposition modeling and design of plasmas processes for synthesis of nano-structured film materials

Jeon G. HAN ,  Bibhuti B. SAHU ,  Manish KUMAR 외 1명

한국진공학회 학술발표회초록집

2016 .08

Low Temperature Silicon Oxynitridation Grown by Hyperthermal Neutral Beam

J. S. Kim ,  D. C. Kim ,  J. H. He 외 4명

한국진공학회 학술발표회초록집

2009 .08