Bias effect on the chemical structure and hardness during deposition of carbon nitride film by RF magnetron sputtering

노기민 ,  유신재 ,  김정형 외 2명

한국진공학회 학술발표회초록집

2010 .02

Effect of the working pressure on hydrogenated bonding and chemical structure during deposition of carbon nitride film by RF magnetron sputtering

Kimin Roh ,  Si kyung Choi ,  Shin Jae You 외 2명

한국진공학회 학술발표회초록집

2009 .02

Effect of post heat-treatment on microstructure and dielectric properties of Ba_0.5Sr_0.5TiO₃ thin films by RF magnetron sputtering

Chil-Hyoung Lee ,  Doo-Jin Choi ,  Young-Jei Oh

한국진공학회 학술발표회초록집

2009 .02

Structural and Optical Properties of CdS Thin Films Deposited by R.F. Magnetron Sputtering

황동현 ,  안정훈 ,  손영국

한국진공학회 학술발표회초록집

2011 .02

Effect on the CNx molecular behavior in N₂ plasma during deposition of carbon nitride film by RF magnetron sputtering

노기민 ,  최시경 ,  김정형

한국진공학회 학술발표회초록집

2008 .02

Growth of nitride semiconductors on oxide templates by rf-magnetron sputtering

나현석 ,  정상용 ,  성태연

한국진공학회 학술발표회초록집

2008 .08

The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

G.C. Kim ,  H.H Jeon ,  S.J. Hwangboe 외 4명

한국진공학회 학술발표회초록집

2007 .08

Study on ZnS Thin Films Prepared by RF Magnetron Sputtering

황동현 ,  안정훈 ,  손영국

한국진공학회 학술발표회초록집

2011 .08

Magnetic and Structural Studies on Fe Doped ZnO thin Films Deposited by RF Magnetron Sputtering

Soo-Young Seo ,  Chang-Ha Kwak ,  Seon-Hyo Kim

한국자기학회 학술연구발표회 논문개요집

2008 .12

The Structural and Physical Properties of Ti films by RF magnetron sputtering

송용화 ,  정충경 ,  부진효

한국진공학회 학술발표회초록집

2005 .02

박막 형광체 ZnGa₂O₄:Mn²⁺의 RF Magnetron Sputtering법을 이용한 생장

박재홍 ,  이성훈 ,  하성진 외 3명

한국진공학회 학술발표회초록집

2006 .02

Rf magnetron sputtered Co79Cr₂₁ 박막의 자기이방성

백종성 ,  김약연 ,  임우영 외 3명

한국자기학회 학술연구발표회 논문개요집

1991 .05

The optical property of GZO and ZnO thin films deposited by RF magnetron sputtering

S.J. Hwang ,  H.H. Jeon ,  G.C. Kim 외 4명

한국진공학회 학술발표회초록집

2007 .08

Effect of thickness and O₂ flow rate on the properties of ITO thin films deposited by RF magnetron sputtering for RGB LED applications

최은실 ,  권재현 ,  이용탁 외 1명

한국진공학회 학술발표회초록집

2009 .02

Growth of ZrO₂ Thin Films Using RF Magnetron Sputtering and Study of Their Surface Characteristics

Yong Sup Sin ,  In Seob Bae ,  Hyon Tae Kwak 외 1명

한국진공학회 학술발표회초록집

2001 .02

Properties of ZnO:Ga thin films deposited by RF magnetron sputtering under various RF power

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2015 .11

Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Characterization of Deposited PZT Thin Film by RF Magnetron Co-sputtering on Si(100) at various O₂ gas ratio

Sujin Choi ,  Juyun Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2014 .08

Ti thin film deposited by grid - assisted magnetron sputtering

Min J. Jung ,  Kyung H. Nam ,  Jeon G. Han 외 1명

한국진공학회 학술발표회초록집

2002 .06