Dry etching of SiC in inductively coupled $SF_6/O_2$ Plasma

Yim ,  Jeong-Hyuk ,  Lee 외 13명

한국결정학회 학술연구발표회

2007 .01

Etching characteristics of Ta and TaN using Cl2 / Ar inductively coupled plasma

M. H. Shin ,  S. W. Na ,  N.-E. Lee 외 1명

한국진공학회 학술발표회초록집

2004 .08

Silicon trench etching using inductively coupled Cl₂/ O₂ and Cl₂/ N₂ plasmas

Hyeon-Soo Kim ,  Young-Jun Lee ,  Geun-Young Yeom

Journal of Korean Vacuum Science & Technology

1998 .10

Novel approaches towards defect-free GaN and InGaN

La ,  s SAMUELSON ,  Zhaoxia BI 외 1명

한국진공학회 학술발표회초록집

2016 .08

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Inductively Coupled Plasma의 Numerical Simulation

주정훈

한국진공학회 학술발표회초록집

1998 .07

Fabrication and Characterization of InGaN/GaN LED structures grown on selectively wet-etched porous GaN template layer

Seol Beck ,  Yong-Hoon Cho

한국진공학회 학술발표회초록집

2010 .02

Si Fin etching using Cl₂/Ar Sync, Asynchronized Pulsed Inductively Coupled Plasmas

김희주 ,  김교운 ,  홍종우 외 2명

한국진공학회 학술발표회초록집

2020 .08

Etching characteristics of ZnO thin films using inductively coupled BCl₃ / Ar and Cl₂ / Ar plasma

S-W. Na ,  M-H. Shin ,  Y-M. Chung 외 4명

한국진공학회 학술발표회초록집

2004 .08

In - situ Plasma Diagnosis with an Optical Emission Spectroscopy during BCl₃- based High - Density Inductively Coupled Dry Etching

조관식 ,  임완태 ,  백인규 외 6명

한국진공학회 학술발표회초록집

2003 .02

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Selective etching of Mo/HfO₂ in inductively coupled Cl₂/O₂ plasmas for gate stack patterning

H.Y. Jung ,  B.S. Kwon ,  H.J. Lee 외 3명

한국진공학회 학술발표회초록집

2008 .02

Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

Eun Ho Kim ,  Yu Bin Xiao ,  Hwa Won Lee 외 1명

한국자기학회 학술연구발표회 논문개요집

2010 .12

Applications of fluid based plasma simulation : dry etch

주정훈

한국진공학회 학술발표회초록집

2018 .02

Two - dimensional simulation of inductively coupled large - area plasma source

S. E. Pa ,  k ,  J. K. Lee 외 2명

한국진공학회 학술발표회초록집

2002 .02

Numerical modeling of Si/SiO₂ etching with inductively coupled CF4 plasma

양원균 ,  주정훈

한국진공학회 학술발표회초록집

2010 .08

Introduction of LT-GaN interlayer in InGaN/GaN multiple quantum well structure

Hyeonseok Woo ,  Jongmin Kim ,  Sangeun Cho 외 6명

한국진공학회 학술발표회초록집

2017 .08

Investigation of Gas Injection Effect in Inductively Coupled Plasma with Fluorocarbon Plasma

Jinha Hwang ,  Minshik Kim ,  Keunju Pa 외 2명

한국진공학회 학술발표회초록집

2009 .02

InGaN/GaN LED 구조의 Bowing 및 광전특성 개선 연구

이관재 ,  김진수 ,  이철로 외 2명

한국진공학회 학술발표회초록집

2015 .08