Sputtering Processes Studied by Medium Energy Ion Scattering Spectroscopy

Dae Won Moon ,  Hyun Kyung Kim ,  Jae Chul Lee 외 1명

한국진공학회 학술발표회초록집

1995 .06

중 에너지 이온산란 분광장치의 제작 및 성능 평가

김현경 ,  문대원 ,  김영필 외 2명

Applied Science and Convergence Technology

1997 .05

The transient sputtering yield change of an amorphous Si layer by low energy O₂+ and Ar+ ion bombardment

Hye Chung Shin ,  Hee Jae Kang ,  Hyung Ik Lee 외 1명

Applied Science and Convergence Technology

2003 .10

The transient Si surface sputtering under low energy oxygen bombardment studied by in - situ MEIS

Hyung-Ik Lee ,  Yong Ho Ha ,  Dae Won Moon

한국진공학회 학술발표회초록집

2001 .02

Chemical State Identification Using Ion Scattering. Low energy Cs+ scattering from H₂O / Si(111) surface

M. C. Yang ,  C. H. Hwang ,  H. Kang

한국진공학회 학술발표회초록집

1996 .02

Applications of KIST 400 ㎸ Accelerator: Imlantation and Medium energy ion scattering (MEIS)

임원철 ,  팔지텐드라씽 ,  김도현 외 3명

한국진공학회 학술발표회초록집

2020 .08

High Energy Ion Scattering을 이용한 표면분석

황정남

Applied Science and Convergence Technology

1993 .12

400 kV Air-Insulated Accelerator System in KIST

Weon Cheol Lim ,  Jae yeoul Kim ,  Hee Kyoung Kang 외 1명

한국진공학회 학술발표회초록집

2017 .02

Direct observation of the structure of electrical double layer (EDL) on solid/liquid interfaces using medium energy ion scattering spectroscopy (MEIS)

Heejin LIM ,  Kangwon JUNG ,  Daewon MOON

한국진공학회 학술발표회초록집

2016 .08

TOF-MEIS 나노분석법

유규상 ,  문대원

진공이야기

2015 .06

Development and Applications of TOF-MEIS (Time-of-Flight -Medium Energy Ion Scattering Spectrometry)

K.-S. Yu ,  Wansup Kim ,  Kyungsu Pa 외 3명

한국진공학회 학술발표회초록집

2014 .02

Surface and Interface Analysis with Medium Energy Ion Scattering Spectroscopy

Dae Wom Moon

한국진공학회 학술발표회초록집

1998 .02

Characterization of HfO₂ Ultrathin Films by Medium Energy Ion Scattering (MEIS)

Weon Cheol Lim ,  Byung-Yong Yu ,  Ki Soo Lee 외 5명

한국진공학회 학술발표회초록집

2015 .02

Application of Ar Gas Cluster Ion Beam Sputtering to surface analysis for oxide thin films

Chanae Pa ,  k ,  Kangil Lee 외 2명

한국진공학회 학술발표회초록집

2014 .08

Effect of Ar ion Sputtering on the Surface Electronic Structure of Indium Tin Oxide

Hyunbok Lee ,  Sang Wan Cho

Applied Science and Convergence Technology

2016 .11

A study of sputter XPS depth profiling of Ta₂O5 / Si without preferential sputtering problems.

김경중 ,  문대원

한국진공학회 학술발표회초록집

1992 .07

Ion Beam Induced Processes in Sputtering of Ta₂O5 / Si Interfaces.

문대원 ,  김경중 ,  김상열

한국진공학회 학술발표회초록집

1993 .02

Morphological Evolution of the low energy Ar+ sputtered Pd(001)

T. C. Kim ,  H. J. Kim ,  D. H. Kim 외 7명

한국진공학회 학술발표회초록집

2003 .08

A MEIS Study on The Structural Property of Porous Silicon

Yongho Ha ,  Sehun Kim ,  J.H. Lee 외 5명

한국진공학회 학술발표회초록집

1998 .07

Investigation of PZT surface deformation by energetic Ar+ ion sputtering

최재민 ,  정두섭 ,  최진학 외 3명

한국진공학회 학술발표회초록집

2000 .07