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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.24 No.5
- 발행연도
- 2024.10
- 수록면
- 393 - 398 (6page)
- DOI
- 10.5573/JSTS.2024.24.5.393
이용수
초록· 키워드
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This paper presents a proof of concept that combines a nano-composite hydrogen detecting sensor and machine-learning technique to achieve accurate and fast detection of hydrogen leakage. The nano-composite hydrogen detecting sensor is fabricated by depositing MoS₂ on a SiO₂/Si wafer using chemical vapor deposition, followed by forming discrete Pd nanoparticles through DC (Direct current) sputtering. This sensor shows high sensitivity of 2.77 and fast response time of 4 to 5 seconds at room temparature, but has a significant dependency on environmental factors such as temperature, and humidity. A machine learning technique, i.e. random forest, was incorporated to filter out the environmental factors. Experimental results show that the combination, i. e. MiCS-2714 sensor not only retains sensitivity, response time of the nan-ocomposite but also attains R² score of 0.994, MSE 0.0506, and the state classification accuracy of 0.979.
목차
Abstract
I. INTRODUCTION
II. MATERIALS AND METHODS
III. RESULTS
IV. CONCLUSIONS
REFERENCES
참고문헌 (8)
참고문헌 신청
Zhong Li, et al, "Resistive-type hydrogen gas sensor based on TiO2: A review", international journal of hydrogen energy 43, 2018, 21114-21132
Wensi Zhang, et al, "Synthesis and sensor applications of MoS2-based nanocomposites", Nanoscale, 2015, 7, 18364.
Wenxin Ao, et al, "Pd-Ta alloy films hydrogen sensors based on partially coated π-phase-shifted FBG", Optical Materials, 2024, 152, 115476
U Jin Cho, et al, "A Palladium-Deposited Molybdenum Disulfide-Based Hydrogen Sensor at Room Temperature", Appl. Sci. 2023, 13, 10594.
Sungje Lee, et al, "Atomic layer deposited Pt nanoparticles on functionalized MoS2 as highly sensitive H2 sensor", Applied Surface Science, 2022, 571, 151256
Wensi Zhang, et al, "Synthesis and sensor applications of MoS2-based nanocomposites", Nanoscale, 2015, 7, 18364.
Wenxin Ao, et al, "Pd-Ta alloy films hydrogen sensors based on partially coated π-phase-shifted FBG", Optical Materials, 2024, 152, 115476
U Jin Cho, et al, "A Palladium-Deposited Molybdenum Disulfide-Based Hydrogen Sensor at Room Temperature", Appl. Sci. 2023, 13, 10594.
Sungje Lee, et al, "Atomic layer deposited Pt nanoparticles on functionalized MoS2 as highly sensitive H2 sensor", Applied Surface Science, 2022, 571, 151256
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