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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.23 No.5
- 발행연도
- 2023.10
- 수록면
- 258 - 264 (7page)
- DOI
- 10.5573/JSTS.2023.23.5.258
이용수
초록· 키워드
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This research presents a resistive-type hydrogen (H<SUB>2</SUB>) gas sensor based on a composite of palladium nanoparticles (Pd-NP) decorated on 2Dmolybdenum disulfide (MoS2) layer. The sensor fabrication involves synthesizing MoS<SUB>2</SUB> and coating Pd by DC sputtering technique. MoS2 has been adopted for its high selectivity for H2, wide operating temperature range, reliability, and low power consumption. Pd has high catalytic properties for H<SUB>2</SUB> and performs a H<SUB>2</SUB> adsorption mechanism through resistance transition. In this study, we propose a Pddecorated MoS2 structure and introduce the chemical resistance mechanism within the channel. The limit of detection (LOD), sensitivity and response time of the fabricated H<SUB>2</SUB> gas sensors are optimized and analyzed. Finally, the nanocomposites network based H<SUB>2</SUB> sensor can promote the utilization of various industries and discuss the issues in sensor applications.
목차
Abstract
I. INTRODUCTION
II. NANO MATERIALS
III. FABRICATION METHOD
IV. GAS SENSOR MECHANISM
V. MEASUREMENT RESULT
V. CONCLUSIONS
REFERENCES
참고문헌 (22)
참고문헌 신청
Sundarrajan, Subramanian, Suleyman I. Allakhverdiev, and Seeram Ramakrishna. "Progress and perspectives in micro direct methanol fuel cell." International Journal of Hydrogen Energy 37.10 (2012): 8765-8786.
Xie, Huaqing, et al. "Thermodynamic study for hydrogen production from bio-oil via sorptionenhanced steam reforming: Comparison with conventional steam reforming." international journal of hydrogen energy 42.48 (2017): 28718-28731.
Koo, Won-Tae, et al. "Chemiresistive hydrogen sensors: fundamentals, recent advances, and challenges." ACS nano 14.11 (2020): 14284-14322.
Sze, Simon M., Yiming Li, and Kwok K. Ng. Physics of semiconductor devices. John wiley & sons, 2021.
Grimes, Craig A., Elizabeth C. Dickey, and Michael V. Pishko, eds. Encyclopedia of sensors. Vol. 10. Stevenson Ranch: American Scientific Publishers, 2006.
Xie, Huaqing, et al. "Thermodynamic study for hydrogen production from bio-oil via sorptionenhanced steam reforming: Comparison with conventional steam reforming." international journal of hydrogen energy 42.48 (2017): 28718-28731.
Koo, Won-Tae, et al. "Chemiresistive hydrogen sensors: fundamentals, recent advances, and challenges." ACS nano 14.11 (2020): 14284-14322.
Sze, Simon M., Yiming Li, and Kwok K. Ng. Physics of semiconductor devices. John wiley & sons, 2021.
Grimes, Craig A., Elizabeth C. Dickey, and Michael V. Pishko, eds. Encyclopedia of sensors. Vol. 10. Stevenson Ranch: American Scientific Publishers, 2006.
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