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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2020.8
- 수록면
- 353 - 360 (8page)
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초록· 키워드
오류제보하기
Adopting an elaborately designed reflective objective consisting of four mirrors, we have developed a rotating-polarizer-type microspot spectroscopic ellipsometer (SE) with an ultra-small spot size. The diameter of the focused beam, whether evaluated using a direct-image method or a knife-edge method, is less than 8.4 μm. After proper correction for the polarizing effect of the mirrors in the reflective objective, we unambiguously determine the dispersion of the complex refractive index and the thickness of monolayer MoS₂ using the measured microspot-spectroellipsometric data. The measured ellipsometric spectra are sensitive enough to identify small variations in thickness of MoS₂ flakes, which ranged from 0.48 nm to 0.67 nm.
목차
Ⅰ. INTRODUCTION
Ⅱ. MICROSPOT SE
Ⅲ. ELLIPSOMETRIC CHARACTERIZATION OF MONOLAYER MoS₂
Ⅳ. SUMMARY AND CONCLUSIONS
REFERENCES
참고문헌 (24)
참고문헌 신청
A. R. Beal / 1979 / Kramer-Kronig analysis of the reflectivity spectra of 2H-MoS2, 2H-MoSe2 and 2H-MoTe2 / J. Phys. C : Solid State Phys 12:881
Y. Li / 2014 / Measurement of the optical dielectric function of monolayer transition-metal dichalcogenides : MoS2, MoSe2, WS2, and WSe2 / Phys. Rev. B 90:205422
Y. V. Morozov / 2015 / Optical constants and dynamic conductivities of single layer MoS2, MoSe2, and WSe2 / Appl. Phys. Lett 107:083103
A. Castellanos-Gomez / 2016 / Spatially resolved optical absorption spectroscopy of single-and few-layer MoS2 by hyperspectral imaging / Nanotechnology 27:115705
C. Hsu / 2019 / Thickness-dependent refractive index of 1L, 2L, and 3L MoS2, MoSe2, WS2, and WSe2 / Adv. Opt. Mater 7:1900239
Y. Li / 2014 / Measurement of the optical dielectric function of monolayer transition-metal dichalcogenides : MoS2, MoSe2, WS2, and WSe2 / Phys. Rev. B 90:205422
Y. V. Morozov / 2015 / Optical constants and dynamic conductivities of single layer MoS2, MoSe2, and WSe2 / Appl. Phys. Lett 107:083103
A. Castellanos-Gomez / 2016 / Spatially resolved optical absorption spectroscopy of single-and few-layer MoS2 by hyperspectral imaging / Nanotechnology 27:115705
C. Hsu / 2019 / Thickness-dependent refractive index of 1L, 2L, and 3L MoS2, MoSe2, WS2, and WSe2 / Adv. Opt. Mater 7:1900239
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