DC Sputter로 성장시킨 단열 스마트필름과 응용에 관한 연구

이동훈 ,  박은미 ,  하인호 외 4명

한국진공학회 학술발표회초록집

2015 .08

SiO2 thin film which apply to roll-to-roll mass product grown by Reactive DC pulse sputtering

Donghoon Lee ,  Eunmi Pa ,  k 외 4명

한국진공학회 학술발표회초록집

2015 .02

Mechanisms involved in modification of film structure and properties in ICP assisted dc and pulsed dc sputtering

Eiji Kusano

한국진공학회 학술발표회초록집

2015 .08

Multi-layer anti-reflection optical thin film with SiOx and NbxOx by using DC pulse sputter system with high-density radical source

Hanbin Lee ,  Minjeong Pa ,  k 외 6명

한국진공학회 학술발표회초록집

2020 .02

Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Feedback control of reactive high power impulse magnetron sputtering by measuring the pulse peak current and adjusting the pulse frequency

Rafael SANCHEZ ,  Tetsuhide SHIMIZU ,  Michelle Ma 외 4명

한국진공학회 학술발표회초록집

2016 .08

Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering

Jiwon Choi ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

Automation of dc magnetron sputtering system using real-time thickness monitor

S. H. Lee ,  Sug-Bong Choe

한국자기학회 학술연구발표회 논문개요집

2019 .11

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02

The comparative study of pure and pulsed DC plasma sputtering for synthesis of nanocrystalline Carbon thin films

Jin Xiang Piao ,  Manish Kuma ,  Amjed Javid 외 3명

한국진공학회 학술발표회초록집

2016 .02

Optimizing of a-IGZO TFT according to Pulse Duty ratio of Pulse-RF and Pulse-DC

Jaewoong Cho ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

Crystal Properties of TiO2 Thin Films Grown at Low Temperatures by Reactive DC Magnetron Sputtering

Hyeok Jee ,  Jin-Soo Kim

새물리

2019 .02

SiO2 and TiO2 thin film deposited by DC pulsed magnetron sputtering with the process variable working pressure

Hye jin jeong ,  Moon Suhk Suh

한국진공학회 학술발표회초록집

2018 .08

Fabrication of W doped VO₂ thin film by pulsed DC sputtering for smart window application

Minha KIM ,  Van Duan NGUYEN ,  Soohyun HWANG 외 3명

한국진공학회 학술발표회초록집

2016 .08

Effects of pulse frequency and duty cycle on the fabrication of CrTiSiN thin films deposited by a hybrid HIPIMS and RF sputtering system

Yi-Xiang QIU ,  Yung-Chin YANG ,  Jyh-Wei LEE

한국진공학회 학술발표회초록집

2016 .08

Using Pulse-Front Tilt to Measure Laser Pulses Less Than 100 Picoseconds in Duration

정훈

한국광학회지

2015 .12

Flexible control of residual stress of (Ti,Al)N films by regulating pulse duration in high power impulse magnetron sputtering

Shuji TAKAHASHI ,  Tetsuhide SHIMIZU ,  Yoshikazu TERANISHI 외 3명

한국진공학회 학술발표회초록집

2016 .08

Structural and morphological properties change of Zn and Sn thin films by sputter time

이석희 ,  박주연 ,  최아롬 외 3명

한국진공학회 학술발표회초록집

2017 .02

High transparent and conductive V₂O₅ graded ITO electrode for quantum dot light emitting diode

최승균 ,  임상휘 ,  김한기

한국진공학회 학술발표회초록집

2020 .02