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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.29 No.6
- 발행연도
- 2020.11
- 수록면
- 143 - 148 (6page)
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초록· 키워드
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Electromagnets suitable for large-scale electron cyclotron resonance (ECR) plasma systems consisting of linear microwaves of 2.45 ㎓ with a uniform electromagnetic field of 875 G were designed from simulation data. A thin film of fluorine-doped tin oxide was deposited at low temperature using the designed electromagnet to obtain the desired electromagnetic field. The simulation data and numerical analysis results for the electromagnetic field of the designed electromagnet and the formation of a large-scale ECR zone agreed well. A large-scale ECR zone with a magnetic field of 875 G was formed at 16 cm from the z-axis. The composition of the fluorine-doped tin oxide film deposited under the ECR zone of 16 ㎝ from the z-axis was dependent on the input current of the electromagnet, which affected the deposition region and the ECR zone. Within this experimental range, the distribution of electrical resistivity of the thin film was influenced by the electromagnetic field.
목차
ABSTRACT
1. Introduction
2. Experimental details
3. Results and discussion
4. Conclusions
References
참고문헌 (18)
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