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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Journal of Korean Vacuum Society Vol.12 No.S1
- 발행연도
- 2003.10
- 수록면
- 74 - 78 (5page)
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In this paper, we studied, by numerical calculation, a system, which was composed of metal-film and metal-substrate irradiated by IPIB with beam ion energy 250 keV, current density 10 to 250 A/㎠. While the IPIB irradiation was going on, an induced effect named mixing occurred. In this case, metal-film and part of metal-substrate melted and mixed. The mixing state was kept as it was in melting phase due to the fast cooling rate. Our works were simulating the heating and cooling process via our STEIPIB program and tried to find proper parameters for a specific filmsubstrate system, 500 ㎚ titanium film coated on aluminum, to get best mixing results. The parameters calculated for such Ti-Al system were compared with the experimental results and were in good accordance to the experimental results.
목차
Abstract
1. Introduction
2. Simulation Method
3. Calculation Results and Discussion
4. Conclusions
Acknowledgments
References
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