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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Journal of Korean Vacuum Science & Technology Journal of Korean Vacuum Science & Technology Vol.3 No.1
- 발행연도
- 1999.4
- 수록면
- 79 - 84 (6page)
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초록· 키워드
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The photolithographic patterning on an indium-tin oxide (ITO) glass and the electrophoretic deposition were combined for preparing the screen of the full-color field emission display(FED). The patterns with a pixel of 400㎛ on the ITO-glass were made by etching the ITO with well-prepared etchant consisting of HCl, H₂O, and HNO₃. Electrophoretic method was carried out in order to deposit each spherical red(R), green(G), and blue(B) phosphor on the patterned ITO-glass. The process parameters such as bias voltage, salt concentration, and deposition time were optimized to achieve clear boundaries. It was found that the etching process of ITO combined with electrophoretic method was cost-effective, provided distinct pattern, and even reduced process steps compared with conventional processes. The application of reverse bias to the dormant electrodes while depositing the phosphors on the stripe pattern was found to be very critical for preventing the cross-contamination of each phosphor in a pixel.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experimental
Ⅲ. Results and Discussion
Ⅳ. Conclusion
Acknowledgement
Reference
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