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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.25 No.5
- 발행연도
- 2016.9
- 수록면
- 92 - 97 (6page)
이용수
초록· 키워드
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Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Accurate Surface Fabrication Method
Ⅲ. Experiments
Ⅳ. Results and Discussion
Ⅴ. Summary
References
참고문헌 (29)
참고문헌 신청
[학술지(정기간행물)] - R. D. Purdr / 1994 / / Appl. Optics 3 : 167 ~
[학술지(정기간행물)] - V. Kudryashov / 2003 / / Microelectron. Eng 67 : 306 ~
[학술지(정기간행물)] - S. Maruo / 1997 / / Opt. Lett 22 : 132 ~
[학술지(정기간행물)] - V. A. Kudryashov / 2001 / / Microelectron. Eng 57 : 819 ~
[학술지(정기간행물)] - K. K. Seet / 2006 / / J. Non-Cryst. Solid 352 : 2390 ~
[학술지(정기간행물)] - V. Kudryashov / 2003 / / Microelectron. Eng 67 : 306 ~
[학술지(정기간행물)] - S. Maruo / 1997 / / Opt. Lett 22 : 132 ~
[학술지(정기간행물)] - V. A. Kudryashov / 2001 / / Microelectron. Eng 57 : 819 ~
[학술지(정기간행물)] - K. K. Seet / 2006 / / J. Non-Cryst. Solid 352 : 2390 ~
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UCI(KEPA) : I410-ECN-0101-2019-420-001276185