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Single phase CuInS2 thin film with the strongest diffraction peak (112) at diffraction angle (2q) of 27.7˚ and the second strongest diffraction peak (220) at diffraction angle (2q) of 46.25˚ was well made with chalcopyrite structure at substrate temperature of 70℃, annealing temperature of 250℃, annealing time of 60 min. The CuInS2 thin film had the greatest grain size of 1.2 ㎛ when the Cu/In composition ratio of 1.03, where the lattice constant of a and c were 5.60Å and 11.12Å, respectively. The Cu/In stoichiometry of the single-phase CuInS2 thin films was from 0.84 to 1.3. The film was p-type when the Cu/In ratio was above 0.99 and was n-type when the Cu/In was below 0.96. The fundamental absorption wavelength, absorption coefficient and optical band gap of p-type CuInS2 thin film with Cu/In =1.3 were 837nm, 3.0×104 cm-1 and 1.48 eV, respectively. The fundamental absorption wavelength, absorption coefficient and optical energy band gap of n-type CuInS2 thin film with Cu/In=0.84 were 821 nm, 6.0×104 cm-1 and 1.51 eV, respectively.

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