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In this paper, electrostatically actuated direct contact type RF MEMS switches have been designed and demonstrated. As driving structures of the switch, cantilever, bridge, and torsion spring beam structures are used and the actuation voltage characteristics of the switches have been compared and discussed. The designed RF switches are fabricated with the surface micromachining technology using the electroplated gold and nickel structures. The characteristics of the fabricated switches are measured and analyzed. The switch, which is fabricated using the 510 μm-length bridge structure with the thickness of 1.5 μm, is actuated with 15 V driving voltage. The insertion losses are less than 0.2 dB over the measured frequency ranges from 0 to 20 GHz and the isolations are more than 30 dB.
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참고문헌 (6)
참고문헌 신청
A. Q. Liu / 2005 / Low-loss lateral micromachined switches for high frequency applications / J. Micromech. and Microeng 15 (1) : 157 ~ 167
D. Peroulis / 2001 / Tunable lumped components with applications to reconfigurable MEMS filters / IEEE MTT-S Dig : 341 ~ 344
J. H. Park / 2002 / V-band reflection type phase shifters using micromachined CPW coupler and RF switches / Journal of Microelectromechanical Systems 11 : 808 ~ 814
J. H. Park / 2003 / A 35-60 GHz single-pole double-throw ?ㅤ(SPDT) switching circuit using direct contact MEMS switches and double resonance technique / Proc. Solid-State Sensors,
J. J. Yao / 1995 / A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz / Proc. Solid-State Sensors, Actuators a
D. Peroulis / 2001 / Tunable lumped components with applications to reconfigurable MEMS filters / IEEE MTT-S Dig : 341 ~ 344
J. H. Park / 2002 / V-band reflection type phase shifters using micromachined CPW coupler and RF switches / Journal of Microelectromechanical Systems 11 : 808 ~ 814
J. H. Park / 2003 / A 35-60 GHz single-pole double-throw ?ㅤ(SPDT) switching circuit using direct contact MEMS switches and double resonance technique / Proc. Solid-State Sensors,
J. J. Yao / 1995 / A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz / Proc. Solid-State Sensors, Actuators a
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