지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제17권 제2호
- 발행연도
- 2016.1
- 수록면
- 92 - 97 (6page)
이용수
초록· 키워드
오류제보하기
This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, abridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.
목차
등록된 정보가 없습니다.
참고문헌 (16)
참고문헌 신청
C. Bozler / 2000 / IEEE MTT-S Int. Microwave Symp :153
N. E. McGruer / 1999 / Sensor Expo
M. Kim / 2001 / A DC-to-40 GHz four-bit RF MEMS true-time delay network / IEEE Microwave and Wireless Components Letters 11(2):56~58
C. L. Goldsmith / 1996 / IEEE MTT-S Int. Microwave Symp. Dig :1141
S. Pacheco / 1998 / IEEE MTT-S Int. Microwave Symp. Dig :1569
N. E. McGruer / 1999 / Sensor Expo
M. Kim / 2001 / A DC-to-40 GHz four-bit RF MEMS true-time delay network / IEEE Microwave and Wireless Components Letters 11(2):56~58
C. L. Goldsmith / 1996 / IEEE MTT-S Int. Microwave Symp. Dig :1141
S. Pacheco / 1998 / IEEE MTT-S Int. Microwave Symp. Dig :1569
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Design Aspects of a New Reliable Torsional Switch with Excellent RF Response
Transactions on Electrical and Electronic Materials
2016 .01
-
An Ultra Wideband, Novel and Reliable RF MEMS Switch
Transactions on Electrical and Electronic Materials
2016 .01
-
Materials Impact on the Performance Analysis and Optimization of RF MEMS Switch for 5G Reconfi gurable Antenna
Transactions on Electrical and Electronic Materials
2019 .01
-
Computation of Beam Stress and RF Performance of a Thin Film Based Q-Band Optimized RF MEMS Switch
Transactions on Electrical and Electronic Materials
2015 .01
-
Improve the Performance of a Novel Capacitive Shunt RF MEMS Switch by Beam and Dielectric Materials
Transactions on Electrical and Electronic Materials
2020 .01
-
Multi-Dielectric & Multi-Band operations on RF MEMS
Transactions on Electrical and Electronic Materials
2016 .01
-
Design, and Analysis of Capacitive Shunt RF MEMS Switch for Reconfigurable Antenna
Transactions on Electrical and Electronic Materials
2021 .01
-
Design and Analysis of Novel RF-MEMS Capacitive Type Shunt Switch for 5G Applications
Transactions on Electrical and Electronic Materials
2022 .02
-
Design of a Non-uniform Serpentine Asymmetric Cantilever RF-MEMS Shunt Capacitive Switch for RADAR Applications
Transactions on Electrical and Electronic Materials
2020 .01
-
High Performance Capacitive RF‑MEMS Switch Based on HfO2 Dielectric
Transactions on Electrical and Electronic Materials
2019 .01
-
Design and Analysis of a Serpentine Type RF MEMS Shunt Switch with Low Pull-in-Voltage
Transactions on Electrical and Electronic Materials
2022 .08
-
Design and Analysis of MEMS Shunt Capacitive Switch with Si 3 N 4 Dielectric and Au Beam Material to Improve Actuation Voltage and RF Performance in Consideration With and Without Circular Perforations
Transactions on Electrical and Electronic Materials
2019 .01
-
Low Pull-in-Voltage RF-MEMS Shunt Switch for 5G Millimeter Wave Applications
Transactions on Electrical and Electronic Materials
2021 .12
-
Design of an Active Inductor-Based T/R Switch in 0.13 μm CMOS Technology for 2.4 GHz RF Transceivers
Transactions on Electrical and Electronic Materials
2016 .01
-
RF-MEMS-Based DPDT Switch on Silicon Substrate for Ku-Band Space-Borne Applications
Transactions on Electrical and Electronic Materials
2017 .02
-
Target Application Based Design Approach for RF MEMS Switches using Artificial Neural Networks
Transactions on Electrical and Electronic Materials
2022 .10
-
Design and Analysis of RF MEMS Cantilever Switches for Parameter Enhancement
Transactions on Electrical and Electronic Materials
2018 .06
-
Design, Analysis and Simulation of RF MEMS Capacitive Shunt Switch with Perforations for Ka-Band Applications
Transactions on Electrical and Electronic Materials
2022 .08
-
Material Optimization of the Novel Cantilever Based RF MEMS Switch for Mobile Communication
Transactions on Electrical and Electronic Materials
2019 .01
-
직·병렬스위치와 직·병렬비대칭 적층형 스위치 성능비교에 관한 연구
전자공학회논문지
2023 .10
이 논문의 저자 정보
최근 본 자료
댓글(0)
0