Silicon Micromachining

M. Esashi

International Conference on Electronics, Informations and Communications

1998 .01

A New Micromachining Technology Using ( 111 ) Silicon

Sang Woo Lee ,  Sang Jun Pa ,  k 외 1명

International Conference on Electronics, Informations and Communications

1998 .01

Silicon Micromachined RF Components : Review

Jong-Gwan Yook

대한전자공학회 학술대회

1999 .06

Substrates and dimension dependence of MEMS Inductors

Hyeon Cheol Kim ,  Kukjin Chun ,  Joonyeop Lee

ICEIC : International Conference on Electronics, Informations and Communications

2008 .06

Fabrication of Fluid Element Using Silicon Micromachining and Performance Analysis Compared With Measurements

김태현 ,  조동일 ,  최해천 외 2명

대한전자공학회 학술대회

1997 .01

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

Young-Min Kim ,  Ho-Cheol Yoon ,  Jong-Hyun Lee

[ETRI] ETRI Journal

2005 .08

Performance Characteristics of a Silicon Micromachined Thermal Flow Sensor for Species of Gases

Sung-Cheoul Roh ,  Yong-Moon Choi

ICEIC : International Conference on Electronics, Informations and Communications

2006 .06

Fabrication of a Nanometer-Scale Si Wire by Micromachining of a Silicon-on-Insulator Substrate

H. Fujii ,  S. Kanema ,  u 외 4명

International Conference on Electronics, Informations and Communications

1998 .01

마이크로머시닝 기술을 이용한 spiral inductor의 제작 및 시뮬레이션 결과

김현호 ,  주병권 ,  이전국 외 2명

대한전기학회 학술대회 논문집

2000 .07

Silicon Micromachining Technologies at Nagoya University

Kazuo Sato

대한기계학회 춘추학술대회 강연집

1999 .01

Silicon-Micromachined Vortex Triode

조장호 ,  김종팔 ,  최병규 외 3명

대한전자공학회 학술대회

1998 .01

Miniaturized Silicon Micromachined Bandpass Filter )

육종관

한국전자파학회논문지

1999 .09

Surface Micromachined Pressure Sensor with Internal Substrate Vacuum Cavity

Chang Han Je and 3 othe ,  s

[ETRI] ETRI Journal

2016 .08

LTCC 기판위에 MEMS 인덕터 특성 연구

박제영 ,  차두열 ,  김성태 외 3명

전기전자재료학회논문지

2007 .01

Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors

Kyoichi Ikeda

International Conference on Electronics, Informations and Communications

1998 .01

A Micromachined Silicon Mirror for Applications to Tunable Optical Switching Device

Kyoung Sung Seo ,  Young Ho Cho ,  Sung Kie Youn

대한기계학회 기타 간행물

1996 .11

미세공정을 이용한 p+ 실리콘 전극 제작 및 플라즈마 실험

공현구 ,  양상식

대한전기학회 학술대회 논문집

2018 .10

Demonstration of Robust Micromachined Jet Technology and Its Application to Realistic Flow Control Problems

Sung Pil Chang

Journal of Mechanical Science and Technology

2006 .04

Micromachining and Cleaning of Silicon by Pulsed Laser Ablation and Plasma Generation

Dongsik Kim ,  Bukuk Oh ,  Deoksuk Jang 외 1명

대한기계학회 춘추학술대회

2009 .05