Silicon Micromachining

M. Esashi

International Conference on Electronics, Informations and Communications

1998 .01

A New Micromachining Technology Using ( 111 ) Silicon

Sang Woo Lee ,  Sang Jun Pa ,  k 외 1명

International Conference on Electronics, Informations and Communications

1998 .01

Fabrication of Fluid Element Using Silicon Micromachining and Performance Analysis Compared With Measurements

김태현 ,  조동일 ,  최해천 외 2명

대한전자공학회 학술대회

1997 .01

Silicon Micromachined RF Components : Review

Jong-Gwan Yook

대한전자공학회 학술대회

1999 .06

Micromachined Inductors on Silicon Substrates

Hwan Hee. Lee ,  Jae Y. Pa ,  k

대한전자공학회 ISOCC

2005 .10

Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors

Kyoichi Ikeda

International Conference on Electronics, Informations and Communications

1998 .01

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

Young-Min Kim ,  Ho-Cheol Yoon ,  Jong-Hyun Lee

[ETRI] ETRI Journal

2005 .08

Silicon Micromachining Technologies at Nagoya University

Kazuo Sato

대한기계학회 춘추학술대회 강연집

1999 .01

Silicon-Micromachined Vortex Triode

조장호 ,  김종팔 ,  최병규 외 3명

대한전자공학회 학술대회

1998 .01

Miniaturized Silicon Micromachined Bandpass Filter )

육종관

한국전자파학회논문지

1999 .09

Demonstration of Robust Micromachined Jet Technology and Its Application to Realistic Flow Control Problems

Sung Pil Chang

Journal of Mechanical Science and Technology

2006 .04

Silicon Pressure Sensor

최시영

대한전자공학회 학술대회

1997 .01

Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Gas Flow Sensor

최주찬 ,  이준규 ,  공성호

센서학회지

2011 .01

Micromachining 기술을 이용한 초소형 자기공명센서 구조 연구

고중규 ,  김경석 ,  안진호

한국재료학회 학술발표대회

1998 .01

A Micromachined Silicon Mirror for Applications to Tunable Optical Switching Device

Kyoung Sung Seo ,  Young Ho Cho ,  Sung Kie Youn

대한기계학회 기타 간행물

1996 .11

미세공정을 이용한 p+ 실리콘 전극 제작 및 플라즈마 실험

공현구 ,  양상식

대한전기학회 학술대회 논문집

2018 .10

Theoretical Study of Flow and Heat Transfer around Silicon Bridge in a Flow Sensor

H. Y. Hwang ,  H. Y. Kim ,  J. T. Chung

KSME/JSME THERMAL and FLUID Engineering Conference

1994 .07

Micromachining and Cleaning of Silicon by Pulsed Laser Ablation and Plasma Generation

Dongsik Kim ,  Bukuk Oh ,  Deoksuk Jang 외 1명

대한기계학회 춘추학술대회

2009 .05

Surface Micromachined Pressure Sensor with Internal Substrate Vacuum Cavity

Chang Han Je and 3 othe ,  s

[ETRI] ETRI Journal

2016 .08

A Piezoresistive Silicon Accelerometer Using Porous Silicon Micromachining and Filp Chip Bonding

Jun Hwan Sim ,  Jong Hyun Lee

International Conference on Electronics, Informations and Communications

1998 .01