Silicon Micromachining

M. Esashi

International Conference on Electronics, Informations and Communications

1998 .01

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

Young-Min Kim ,  Ho-Cheol Yoon ,  Jong-Hyun Lee

[ETRI] ETRI Journal

2005 .08

Silicon Micromachined RF Components : Review

Jong-Gwan Yook

대한전자공학회 학술대회

1999 .06

Micromachined Inductors on Silicon Substrates

Hwan Hee. Lee ,  Jae Y. Pa ,  k

대한전자공학회 ISOCC

2005 .10

Fabrication of Fluid Element Using Silicon Micromachining and Performance Analysis Compared With Measurements

김태현 ,  조동일 ,  최해천 외 2명

대한전자공학회 학술대회

1997 .01

Performance Characteristics of a Silicon Micromachined Thermal Flow Sensor for Species of Gases

Sung-Cheoul Roh ,  Yong-Moon Choi

ICEIC : International Conference on Electronics, Informations and Communications

2006 .06

Silicon Micromachining Technologies at Nagoya University

Kazuo Sato

대한기계학회 춘추학술대회 강연집

1999 .01

Silicon-Micromachined Vortex Triode

조장호 ,  김종팔 ,  최병규 외 3명

대한전자공학회 학술대회

1998 .01

Miniaturized Silicon Micromachined Bandpass Filter )

육종관

한국전자파학회논문지

1999 .09

Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors

Kyoichi Ikeda

International Conference on Electronics, Informations and Communications

1998 .01

A Micromachined Silicon Mirror for Applications to Tunable Optical Switching Device

Kyoung Sung Seo ,  Young Ho Cho ,  Sung Kie Youn

대한기계학회 기타 간행물

1996 .11

미세공정을 이용한 p+ 실리콘 전극 제작 및 플라즈마 실험

공현구 ,  양상식

대한전기학회 학술대회 논문집

2018 .10

Demonstration of Robust Micromachined Jet Technology and Its Application to Realistic Flow Control Problems

Sung Pil Chang

Journal of Mechanical Science and Technology

2006 .04

Micromachining and Cleaning of Silicon by Pulsed Laser Ablation and Plasma Generation

Dongsik Kim ,  Bukuk Oh ,  Deoksuk Jang 외 1명

대한기계학회 춘추학술대회

2009 .05

A Piezoresistive Silicon Accelerometer Using Porous Silicon Micromachining and Filp Chip Bonding

Jun Hwan Sim ,  Jong Hyun Lee

International Conference on Electronics, Informations and Communications

1998 .01

Real-time detection of focal position for high precision laser micromachining

Binh Xuan Cao ,  Phuong Hoang ,  Sanghoon Ahn 외 2명

한국생산제조학회 학술발표대회 논문집

2016 .10

Fabrication of a Nanometer-Scale Si Wire by Micromachining of a Silicon-on-Insulator Substrate

H. Fujii ,  S. Kanema ,  u 외 4명

International Conference on Electronics, Informations and Communications

1998 .01

Experimental Comparison of Various Slow-wave structures for V-Band Application using Surface Micromachining Technology

Baek-Seok Ko ,  Han-Shin Lee ,  Tae-Jong Baek 외 8명

ITC-CSCC :International Technical Conference on Circuits Systems, Computers and Communications

2004 .07

Micromachining 기술을 이용한 초소형 자기공명센서 구조 연구

고중규 ,  김경석 ,  안진호

한국재료학회 학술발표대회

1998 .01

액상에서의 엑시머 레이저 실리콘 미세가공

장덕석 ,  김동식

한국레이저가공학회지

2008 .01