Bias effect on the chemical structure and hardness during deposition of carbon nitride film by RF magnetron sputtering

노기민 ,  유신재 ,  김정형 외 2명

한국진공학회 학술발표회초록집

2010 .02

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

Ion Beam Energy effect of the Carbon Nitride Thin Film formation by Direct Dual Ion Beam Deposition

김용환 ,  최동준 ,  한동원 외 1명

한국진공학회 학술발표회초록집

1997 .07

Effect of the working pressure on hydrogenated bonding and chemical structure during deposition of carbon nitride film by RF magnetron sputtering

Kimin Roh ,  Si kyung Choi ,  Shin Jae You 외 2명

한국진공학회 학술발표회초록집

2009 .02

비정질 carbon nitride 의 열안정성과 전계방출 특성

지응준 ,  심재엽 ,  이성만 외 2명

한국진공학회 학술발표회초록집

1997 .02

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Behaviour of nitrided layer formed on S45C carbon steel during gaseous nitriding

손석원 ,  유광춘 ,  이원범

한국진공학회 학술발표회초록집

2016 .02

Improved device performance of boron-nitride-based thin-film transistors

Jun-Young JEON ,  Ban-Suk PARK ,  Anne HENRY 외 1명

한국진공학회 학술발표회초록집

2016 .08

Effect on the CNx molecular behavior in N₂ plasma during deposition of carbon nitride film by RF magnetron sputtering

노기민 ,  최시경 ,  김정형

한국진공학회 학술발표회초록집

2008 .02

Novel thermoelectric thin film nitrides by theory and experiments

Pe ,  EKLUND

한국진공학회 학술발표회초록집

2016 .08

Tungsten Nitride Thin Film Deposition for Copper Diffusion Barrier by Using Atomic Layer Deposition

황영현 ,  조원주 ,  김영환 외 1명

한국진공학회 학술발표회초록집

2011 .08

Synthesis and Characterization of Tin Nitride Thin Films Deposited by Low Nitrogen Gas Ratio

박주연 ,  강용철

한국진공학회 학술발표회초록집

2014 .02

Time evolution of radical deposition rate and cluster amount

Masaha ,  u SHIRATANI ,  Susumu TOKO 외 8명

한국진공학회 학술발표회초록집

2016 .08

Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition

Joonwon Lee ,  Jaehyun Han ,  Jong-souk Yeo

한국진공학회 학술발표회초록집

2017 .08

Deposition and Characterization of $Al_2O_3$ Thin Film by Aerosol Deposition

Cho ,  Hyun-Min ,  Kim 외 1명

한국결정학회 학술연구발표회

2007 .01

Effects of Deposition Dynamics on Thin Film Growth

서지근 ,  김혜영 ,  권수미 외 1명

한국진공학회 학술발표회초록집

2007 .02

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Effect of pressure on the chemical composition and structure of carbon nitride film deposited by RF magnetron sputtering

Kimin Roh ,  Byung-Keun Na ,  Si-Kyoung Choi 외 1명

한국진공학회 학술발표회초록집

2007 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02